JPS63131061U - - Google Patents
Info
- Publication number
- JPS63131061U JPS63131061U JP2296187U JP2296187U JPS63131061U JP S63131061 U JPS63131061 U JP S63131061U JP 2296187 U JP2296187 U JP 2296187U JP 2296187 U JP2296187 U JP 2296187U JP S63131061 U JPS63131061 U JP S63131061U
- Authority
- JP
- Japan
- Prior art keywords
- high frequency
- torch
- plasma
- coil
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 229910052799 carbon Inorganic materials 0.000 claims description 3
- 238000009616 inductively coupled plasma Methods 0.000 claims 2
- 230000006698 induction Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2296187U JPH0521247Y2 (https=) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2296187U JPH0521247Y2 (https=) | 1987-02-19 | 1987-02-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63131061U true JPS63131061U (https=) | 1988-08-26 |
| JPH0521247Y2 JPH0521247Y2 (https=) | 1993-05-31 |
Family
ID=30820841
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2296187U Expired - Lifetime JPH0521247Y2 (https=) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521247Y2 (https=) |
-
1987
- 1987-02-19 JP JP2296187U patent/JPH0521247Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521247Y2 (https=) | 1993-05-31 |