JPS63131061U - - Google Patents

Info

Publication number
JPS63131061U
JPS63131061U JP2296187U JP2296187U JPS63131061U JP S63131061 U JPS63131061 U JP S63131061U JP 2296187 U JP2296187 U JP 2296187U JP 2296187 U JP2296187 U JP 2296187U JP S63131061 U JPS63131061 U JP S63131061U
Authority
JP
Japan
Prior art keywords
high frequency
torch
plasma
coil
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2296187U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521247Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2296187U priority Critical patent/JPH0521247Y2/ja
Publication of JPS63131061U publication Critical patent/JPS63131061U/ja
Application granted granted Critical
Publication of JPH0521247Y2 publication Critical patent/JPH0521247Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP2296187U 1987-02-19 1987-02-19 Expired - Lifetime JPH0521247Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2296187U JPH0521247Y2 (enrdf_load_stackoverflow) 1987-02-19 1987-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2296187U JPH0521247Y2 (enrdf_load_stackoverflow) 1987-02-19 1987-02-19

Publications (2)

Publication Number Publication Date
JPS63131061U true JPS63131061U (enrdf_load_stackoverflow) 1988-08-26
JPH0521247Y2 JPH0521247Y2 (enrdf_load_stackoverflow) 1993-05-31

Family

ID=30820841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2296187U Expired - Lifetime JPH0521247Y2 (enrdf_load_stackoverflow) 1987-02-19 1987-02-19

Country Status (1)

Country Link
JP (1) JPH0521247Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0521247Y2 (enrdf_load_stackoverflow) 1993-05-31

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