JPS63130722U - - Google Patents
Info
- Publication number
- JPS63130722U JPS63130722U JP2239587U JP2239587U JPS63130722U JP S63130722 U JPS63130722 U JP S63130722U JP 2239587 U JP2239587 U JP 2239587U JP 2239587 U JP2239587 U JP 2239587U JP S63130722 U JPS63130722 U JP S63130722U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- movable mirror
- optical device
- heater
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 5
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Mechanical Optical Scanning Systems (AREA)
Description
第１図は、この考案の一実施例を示す概念図、
第２図はこの考案の一実施例を示す断面図、第３
図は、従来の光学装置を示す概念図、第４図は従
来の光学装置を示す断面図である。
図において１は対物レンズ、２は可動ミラー、
３は固定ミラー、４は光学センサ、５はフレーム
、６は軸受、７は固定部、８はモータ、９は姿勢
センサ、１０は位置検出器、１１は軸、１２は軸
受、１３はモータ、１４は姿勢センサ、１５は位
置検出器、１６は形状記憶合金、１７はヒータで
ある。なお、図中同一符号は同一または相当部分
を示す。
FIG. 1 is a conceptual diagram showing an embodiment of this invention.
Figure 2 is a sectional view showing one embodiment of this invention;
The figure is a conceptual diagram showing a conventional optical device, and FIG. 4 is a sectional view showing the conventional optical device. In the figure, 1 is an objective lens, 2 is a movable mirror,
3 is a fixed mirror, 4 is an optical sensor, 5 is a frame, 6 is a bearing, 7 is a fixed part, 8 is a motor, 9 is a posture sensor, 10 is a position detector, 11 is a shaft, 12 is a bearing, 13 is a motor, 14 is a posture sensor, 15 is a position detector, 16 is a shape memory alloy, and 17 is a heater. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
を保持するためのフレームと、このフレーム内に
配置される可動ミラーと、この可動ミラーと上記
フレームとを各々回転自由に支持する固定部と、
上記可動ミラーに取付けられた姿勢センサとから
なる光学装置において、上記フレームをモータで
駆動するとともに、上記フレームと上記可動ミラ
ーとをヒータを有する形状記憶合金で接続し、上
記姿勢センサの信号をフイードバツクし上記ヒー
タを加熱することにより、形状記憶合金が変形し
、上記可動ミラーが駆動されるように構成したこ
とを特徴とする光学装置。 an objective lens for condensing light, a frame for holding the objective lens, a movable mirror disposed within the frame, and a fixed part that rotatably supports each of the movable mirror and the frame;
In an optical device comprising an attitude sensor attached to the movable mirror, the frame is driven by a motor, the frame and the movable mirror are connected by a shape memory alloy having a heater, and the signal of the attitude sensor is fed back. An optical device characterized in that the shape memory alloy is deformed by heating the heater, and the movable mirror is driven.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2239587U JPS63130722U (en) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2239587U JPS63130722U (en) | 1987-02-18 | 1987-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63130722U true JPS63130722U (en) | 1988-08-26 |
Family
ID=30819736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2239587U Pending JPS63130722U (en) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63130722U (en) |
-
1987
- 1987-02-18 JP JP2239587U patent/JPS63130722U/ja active Pending