JPS63128726U - - Google Patents

Info

Publication number

JPS63128726U

JPS63128726U JP1990687U JP1990687U JPS63128726U JP S63128726 U JPS63128726 U JP S63128726U JP 1990687 U JP1990687 U JP 1990687U JP 1990687 U JP1990687 U JP 1990687U JP S63128726 U JPS63128726 U JP S63128726U

Authority

JP

Japan

Prior art keywords

amorphous silicon

utility

protective film

scope

registration request

Prior art date

1987-02-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 230000001681 protective effect Effects 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
• 229910052710 silicon Inorganic materials 0.000 description 2
• 239000010703 silicon Substances 0.000 description 2
• 238000009792 diffusion process Methods 0.000 description 1
• 239000002184 metal Substances 0.000 description 1