JPS63128720U - - Google Patents

Info

Publication number
JPS63128720U
JPS63128720U JP2076787U JP2076787U JPS63128720U JP S63128720 U JPS63128720 U JP S63128720U JP 2076787 U JP2076787 U JP 2076787U JP 2076787 U JP2076787 U JP 2076787U JP S63128720 U JPS63128720 U JP S63128720U
Authority
JP
Japan
Prior art keywords
gas
wafer
film
blowing sections
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2076787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2076787U priority Critical patent/JPS63128720U/ja
Publication of JPS63128720U publication Critical patent/JPS63128720U/ja
Pending legal-status Critical Current

Links

JP2076787U 1987-02-17 1987-02-17 Pending JPS63128720U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2076787U JPS63128720U (fr) 1987-02-17 1987-02-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2076787U JPS63128720U (fr) 1987-02-17 1987-02-17

Publications (1)

Publication Number Publication Date
JPS63128720U true JPS63128720U (fr) 1988-08-23

Family

ID=30816580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2076787U Pending JPS63128720U (fr) 1987-02-17 1987-02-17

Country Status (1)

Country Link
JP (1) JPS63128720U (fr)

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