JPS63128720U - - Google Patents
Info
- Publication number
- JPS63128720U JPS63128720U JP2076787U JP2076787U JPS63128720U JP S63128720 U JPS63128720 U JP S63128720U JP 2076787 U JP2076787 U JP 2076787U JP 2076787 U JP2076787 U JP 2076787U JP S63128720 U JPS63128720 U JP S63128720U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- wafer
- film
- blowing sections
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims description 4
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076787U JPS63128720U (fr) | 1987-02-17 | 1987-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2076787U JPS63128720U (fr) | 1987-02-17 | 1987-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63128720U true JPS63128720U (fr) | 1988-08-23 |
Family
ID=30816580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2076787U Pending JPS63128720U (fr) | 1987-02-17 | 1987-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63128720U (fr) |
-
1987
- 1987-02-17 JP JP2076787U patent/JPS63128720U/ja active Pending