JPS6312832U - - Google Patents
Info
- Publication number
- JPS6312832U JPS6312832U JP10586586U JP10586586U JPS6312832U JP S6312832 U JPS6312832 U JP S6312832U JP 10586586 U JP10586586 U JP 10586586U JP 10586586 U JP10586586 U JP 10586586U JP S6312832 U JPS6312832 U JP S6312832U
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- slide table
- supply
- storage mechanism
- rail
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10586586U JPS6312832U (en:Method) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10586586U JPS6312832U (en:Method) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312832U true JPS6312832U (en:Method) | 1988-01-27 |
Family
ID=30980696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10586586U Pending JPS6312832U (en:Method) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312832U (en:Method) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013026270A (ja) * | 2011-07-15 | 2013-02-04 | Hitachi High-Tech Instruments Co Ltd | フレーム供給装置およびフレーム供給方法 |
| KR101349512B1 (ko) * | 2011-10-31 | 2014-01-10 | 주식회사 테크웰시스템 | 기판 이송 장치 및 방법 |
-
1986
- 1986-07-10 JP JP10586586U patent/JPS6312832U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013026270A (ja) * | 2011-07-15 | 2013-02-04 | Hitachi High-Tech Instruments Co Ltd | フレーム供給装置およびフレーム供給方法 |
| KR101328806B1 (ko) * | 2011-07-15 | 2013-11-20 | 가부시끼가이샤 히다찌 하이테크 인스트루먼츠 | 프레임 공급 장치 및 프레임 공급 방법 |
| KR101349512B1 (ko) * | 2011-10-31 | 2014-01-10 | 주식회사 테크웰시스템 | 기판 이송 장치 및 방법 |
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