JPS6312831U - - Google Patents
Info
- Publication number
- JPS6312831U JPS6312831U JP10619886U JP10619886U JPS6312831U JP S6312831 U JPS6312831 U JP S6312831U JP 10619886 U JP10619886 U JP 10619886U JP 10619886 U JP10619886 U JP 10619886U JP S6312831 U JPS6312831 U JP S6312831U
- Authority
- JP
- Japan
- Prior art keywords
- push rod
- tube
- furnace
- boat
- diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 7
- 238000011017 operating method Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10619886U JPS6312831U (xx) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10619886U JPS6312831U (xx) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312831U true JPS6312831U (xx) | 1988-01-27 |
Family
ID=30981332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10619886U Pending JPS6312831U (xx) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312831U (xx) |
-
1986
- 1986-07-10 JP JP10619886U patent/JPS6312831U/ja active Pending
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