JPS6312829U - - Google Patents
Info
- Publication number
- JPS6312829U JPS6312829U JP10615386U JP10615386U JPS6312829U JP S6312829 U JPS6312829 U JP S6312829U JP 10615386 U JP10615386 U JP 10615386U JP 10615386 U JP10615386 U JP 10615386U JP S6312829 U JPS6312829 U JP S6312829U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- stand
- vapor phase
- phase growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000376 reactant Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10615386U JPS6312829U (show.php) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10615386U JPS6312829U (show.php) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312829U true JPS6312829U (show.php) | 1988-01-27 |
Family
ID=30981253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10615386U Pending JPS6312829U (show.php) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312829U (show.php) |
-
1986
- 1986-07-10 JP JP10615386U patent/JPS6312829U/ja active Pending