JPS63128286U - - Google Patents
Info
- Publication number
- JPS63128286U JPS63128286U JP2002187U JP2002187U JPS63128286U JP S63128286 U JPS63128286 U JP S63128286U JP 2002187 U JP2002187 U JP 2002187U JP 2002187 U JP2002187 U JP 2002187U JP S63128286 U JPS63128286 U JP S63128286U
- Authority
- JP
- Japan
- Prior art keywords
- casing
- bearing
- bearing housing
- annular groove
- flange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims 1
Description
第１図は本考案の一実施例を示すターボ分子ポ
ンプの軸受装置の断面図、第２図は第１図の平面
図、第３図は本考案の他の実施例を示す断面図、
第４図は従来の断面図である。
１……ケーシング、２……回転軸、３……軸受
、４……軸受ハウジング、５……弾性ゴム、８…
…環状溝、９……開口部、１０……ベロー付フラ
ンジ、１１……フイン付環状溝。
FIG. 1 is a cross-sectional view of a bearing device for a turbo-molecular pump showing one embodiment of the present invention, FIG. 2 is a plan view of FIG. 1, and FIG. 3 is a cross-sectional view showing another embodiment of the present invention.
FIG. 4 is a sectional view of a conventional device. DESCRIPTION OF SYMBOLS 1... Casing, 2... Rotating shaft, 3... Bearing, 4... Bearing housing, 5... Elastic rubber, 8...
... annular groove, 9 ... opening, 10 ... flange with bellows, 11 ... annular groove with fins.
Claims (1)
転軸を回転自在に支承する軸受と、この軸受の外
周に嵌合しケーシング内周とは所定の間隙を配し
た軸受ハウジングと、この軸受ハウジングとケー
シングとにより形成される間隙に軸方向に離間し
て配置した一対の弾性体とを備えた軸受装置にお
いて、軸受ハウジングに冷却媒体を貫流させる環
状溝を形成し、この環状溝に連通し相対向する一
対の開口部をケーシングに設け、この開口部より
環状溝にベロー付フランジを挿入し、このベロー
付フランジにより軸受ハウジングとケーシングと
を接続するようにしたことを特徴とするターボ分
子ポンプの軸受装置。 A casing, a bearing disposed within the casing and rotatably supporting a rotating shaft, a bearing housing that fits on the outer circumference of the bearing and is spaced apart from the inner circumference of the casing by a predetermined distance, and the bearing housing and the casing. In a bearing device including a pair of elastic bodies disposed apart from each other in the axial direction in a gap formed therein, an annular groove through which a cooling medium flows is formed in the bearing housing, and a pair of elastic bodies communicating with the annular groove and facing each other are formed in the bearing housing. A bearing device for a turbo molecular pump, characterized in that an opening is provided in a casing, a flange with bellows is inserted into an annular groove through the opening, and the flange with bellows connects a bearing housing and a casing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002187U JPS63128286U (en) | 1987-02-16 | 1987-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002187U JPS63128286U (en) | 1987-02-16 | 1987-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63128286U true JPS63128286U (en) | 1988-08-22 |
Family
ID=30815145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002187U Pending JPS63128286U (en) | 1987-02-16 | 1987-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63128286U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002526721A (en) * | 1998-10-07 | 2002-08-20 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | Friction vacuum pump |
-
1987
- 1987-02-16 JP JP2002187U patent/JPS63128286U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002526721A (en) * | 1998-10-07 | 2002-08-20 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | Friction vacuum pump |
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