JPS63127977U - - Google Patents

Info

Publication number
JPS63127977U
JPS63127977U JP2002787U JP2002787U JPS63127977U JP S63127977 U JPS63127977 U JP S63127977U JP 2002787 U JP2002787 U JP 2002787U JP 2002787 U JP2002787 U JP 2002787U JP S63127977 U JPS63127977 U JP S63127977U
Authority
JP
Japan
Prior art keywords
shaft
input drive
drive shaft
chuck body
bobbin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002787U
Other languages
Japanese (ja)
Other versions
JPH0543092Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987020027U priority Critical patent/JPH0543092Y2/ja
Publication of JPS63127977U publication Critical patent/JPS63127977U/ja
Application granted granted Critical
Publication of JPH0543092Y2 publication Critical patent/JPH0543092Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Winding Filamentary Materials (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

図面は本考案による巻取式真空蒸着装置の巻取
、巻出軸組立体の一実施例を示す概略断面図であ
る。 図中、1:入力駆動軸、6:チヤツク本体、7
:ボビン軸連結部材、8:キー、9:締め付けボ
ルト、10:キー、11:セツトビス、12:ボ
ビン軸、13:キー、14:締め付け部材、15
:固定部材。
The drawing is a schematic sectional view showing an embodiment of the winding and unwinding shaft assembly of the winding type vacuum evaporation apparatus according to the present invention. In the figure, 1: input drive shaft, 6: chuck body, 7
: Bobbin shaft connecting member, 8: Key, 9: Tightening bolt, 10: Key, 11: Set screw, 12: Bobbin shaft, 13: Key, 14: Tightening member, 15
:Fixed member.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 一端を駆動モータに連結した入力駆動軸と、こ
の入力駆動軸の他端に着脱可能に装着され、上記
入力駆動軸に四つて回転駆動されるチヤツク本体
と、上記チヤツク本体とボビン軸との間にそれぞ
れと着脱可能に同軸に装着され、上記チヤツク本
体を介して上記入力駆動軸から伝達される回転駆
動力を上記ボビン軸に伝達するボビン軸連結部材
とを有することを特徴とする巻取式真空蒸着装置
の巻取、巻出軸組立体。
An input drive shaft whose one end is connected to a drive motor, a chuck body which is removably attached to the other end of the input drive shaft and is rotationally driven by the input drive shaft, and a gap between the chuck body and the bobbin shaft. and a bobbin shaft connecting member that is removably attached coaxially to each of the chucks and transmits rotational driving force transmitted from the input drive shaft to the bobbin shaft via the chuck body. Winding and unwinding shaft assembly for vacuum evaporation equipment.
JP1987020027U 1987-02-16 1987-02-16 Expired - Lifetime JPH0543092Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987020027U JPH0543092Y2 (en) 1987-02-16 1987-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987020027U JPH0543092Y2 (en) 1987-02-16 1987-02-16

Publications (2)

Publication Number Publication Date
JPS63127977U true JPS63127977U (en) 1988-08-22
JPH0543092Y2 JPH0543092Y2 (en) 1993-10-29

Family

ID=30815157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987020027U Expired - Lifetime JPH0543092Y2 (en) 1987-02-16 1987-02-16

Country Status (1)

Country Link
JP (1) JPH0543092Y2 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS537577A (en) * 1976-07-09 1978-01-24 Babcock Hitachi Kk Simultaneous desulfurizing and denitrating method for exhaust gas
JPS55138417U (en) * 1979-03-27 1980-10-02
JPS5919725U (en) * 1982-07-27 1984-02-06 宇部興産株式会社 tiled unit
JPS60157756U (en) * 1984-03-28 1985-10-21 帝人製機株式会社 Yarn winding device
JPS61161732U (en) * 1985-03-29 1986-10-07

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS537577A (en) * 1976-07-09 1978-01-24 Babcock Hitachi Kk Simultaneous desulfurizing and denitrating method for exhaust gas
JPS55138417U (en) * 1979-03-27 1980-10-02
JPS5919725U (en) * 1982-07-27 1984-02-06 宇部興産株式会社 tiled unit
JPS60157756U (en) * 1984-03-28 1985-10-21 帝人製機株式会社 Yarn winding device
JPS61161732U (en) * 1985-03-29 1986-10-07

Also Published As

Publication number Publication date
JPH0543092Y2 (en) 1993-10-29

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