JPS63127974U - - Google Patents

Info

Publication number

JPS63127974U

JPS63127974U JP1959287U JP1959287U JPS63127974U JP S63127974 U JPS63127974 U JP S63127974U JP 1959287 U JP1959287 U JP 1959287U JP 1959287 U JP1959287 U JP 1959287U JP S63127974 U JPS63127974 U JP S63127974U

Authority

JP

Japan

Prior art keywords

film

semiconductor wafer

metal plate

shaped jig

forming

Prior art date

1987-02-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000002184 metal Substances 0.000 claims description 8
• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000010408 film Substances 0.000 claims description 4
• 239000010419 fine particle Substances 0.000 claims description 2
• 239000011888 foil Substances 0.000 claims description 2
• 239000010409 thin film Substances 0.000 claims description 2
• 230000001678 irradiating effect Effects 0.000 claims 1
• 230000015572 biosynthetic process Effects 0.000 description 1
• 238000001704 evaporation Methods 0.000 description 1
• 230000008020 evaporation Effects 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1