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Method for forming dielectric film in trenches by PEALD using H-containing gas
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Asm Ip Holding B.V. |
Method for forming vertical spacers for spacer-defined patterning
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2018-01-19 |
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荷蘭商Ａｓｍ 智慧財產控股公司 |
沈積方法
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2018-11-07 |
2021-06-08 |
Asm Ip Holding B.V. |
Methods for depositing a boron doped silicon germanium film
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2018-11-28 |
2024-07-16 |
Asm Ip Holding B.V. |
Substrate processing apparatus for processing substrates
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2019-05-17 |
2023-01-17 |
Asm Ip Holding B.V. |
Susceptor shaft
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2019-07-29 |
2021-02-02 |
Asm Ip私人控股有限公司 |
实现高掺杂剂掺入的选择性沉积方法
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2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Insulator
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2019-08-22 |
2021-03-05 |
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2019-12-19 |
2022-12-13 |
Asm Ip Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures
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2020-08-18 |
2024-07-16 |
Asm Ip Holding B.V. |
Methods for forming a laminate film by cyclical plasma-enhanced deposition processes
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