JPS63127124U - - Google Patents
Info
- Publication number
- JPS63127124U JPS63127124U JP1871287U JP1871287U JPS63127124U JP S63127124 U JPS63127124 U JP S63127124U JP 1871287 U JP1871287 U JP 1871287U JP 1871287 U JP1871287 U JP 1871287U JP S63127124 U JPS63127124 U JP S63127124U
- Authority
- JP
- Japan
- Prior art keywords
- fixing part
- performs
- coating
- utility
- drying process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 230000006837 decompression Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1871287U JPS63127124U (enExample) | 1987-02-13 | 1987-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1871287U JPS63127124U (enExample) | 1987-02-13 | 1987-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127124U true JPS63127124U (enExample) | 1988-08-19 |
Family
ID=30812634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1871287U Pending JPS63127124U (enExample) | 1987-02-13 | 1987-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127124U (enExample) |
-
1987
- 1987-02-13 JP JP1871287U patent/JPS63127124U/ja active Pending