JPS63127121U - - Google Patents

Info

Publication number

JPS63127121U

JPS63127121U JP1804587U JP1804587U JPS63127121U JP S63127121 U JPS63127121 U JP S63127121U JP 1804587 U JP1804587 U JP 1804587U JP 1804587 U JP1804587 U JP 1804587U JP S63127121 U JPS63127121 U JP S63127121U

Authority

JP

Japan

Prior art keywords

wheels

wafer

heat treatment

wafer board

cover

Prior art date

1987-02-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 235000012431 wafers Nutrition 0.000 claims 4
• 238000010438 heat treatment Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (1)