JPS63127061U - - Google Patents

Info

Publication number
JPS63127061U
JPS63127061U JP1827587U JP1827587U JPS63127061U JP S63127061 U JPS63127061 U JP S63127061U JP 1827587 U JP1827587 U JP 1827587U JP 1827587 U JP1827587 U JP 1827587U JP S63127061 U JPS63127061 U JP S63127061U
Authority
JP
Japan
Prior art keywords
accelerating electrode
electrode
exhaust port
extraction
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1827587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1827587U priority Critical patent/JPS63127061U/ja
Publication of JPS63127061U publication Critical patent/JPS63127061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1827587U 1987-02-10 1987-02-10 Pending JPS63127061U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1827587U JPS63127061U (US20100056889A1-20100304-C00004.png) 1987-02-10 1987-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1827587U JPS63127061U (US20100056889A1-20100304-C00004.png) 1987-02-10 1987-02-10

Publications (1)

Publication Number Publication Date
JPS63127061U true JPS63127061U (US20100056889A1-20100304-C00004.png) 1988-08-19

Family

ID=30811802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1827587U Pending JPS63127061U (US20100056889A1-20100304-C00004.png) 1987-02-10 1987-02-10

Country Status (1)

Country Link
JP (1) JPS63127061U (US20100056889A1-20100304-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003257330A (ja) * 2002-03-06 2003-09-12 Jeol Ltd 集束イオンビーム装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003257330A (ja) * 2002-03-06 2003-09-12 Jeol Ltd 集束イオンビーム装置

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