JPS63126566U - - Google Patents

Info

Publication number
JPS63126566U
JPS63126566U JP1774987U JP1774987U JPS63126566U JP S63126566 U JPS63126566 U JP S63126566U JP 1774987 U JP1774987 U JP 1774987U JP 1774987 U JP1774987 U JP 1774987U JP S63126566 U JPS63126566 U JP S63126566U
Authority
JP
Japan
Prior art keywords
plunger
piezoelectric element
outer cylinder
sealing material
pump device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1774987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1774987U priority Critical patent/JPS63126566U/ja
Publication of JPS63126566U publication Critical patent/JPS63126566U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Details Of Reciprocating Pumps (AREA)
JP1774987U 1987-02-12 1987-02-12 Pending JPS63126566U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1774987U JPS63126566U (enrdf_load_stackoverflow) 1987-02-12 1987-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1774987U JPS63126566U (enrdf_load_stackoverflow) 1987-02-12 1987-02-12

Publications (1)

Publication Number Publication Date
JPS63126566U true JPS63126566U (enrdf_load_stackoverflow) 1988-08-18

Family

ID=30810785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1774987U Pending JPS63126566U (enrdf_load_stackoverflow) 1987-02-12 1987-02-12

Country Status (1)

Country Link
JP (1) JPS63126566U (enrdf_load_stackoverflow)

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