JPS63124761U - - Google Patents

Info

Publication number

JPS63124761U

JPS63124761U JP1647087U JP1647087U JPS63124761U JP S63124761 U JPS63124761 U JP S63124761U JP 1647087 U JP1647087 U JP 1647087U JP 1647087 U JP1647087 U JP 1647087U JP S63124761 U JPS63124761 U JP S63124761U

Authority

JP

Japan

Prior art keywords

layer

layer formed

thin film

film transistor

insulating substrate

Prior art date

1987-02-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• 239000010409 thin film Substances 0.000 claims description 3
• 229910021417 amorphous silicon Inorganic materials 0.000 claims 2
• 229910004205 SiNX Inorganic materials 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000000605 extraction Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1