JPS63124747U - - Google Patents
Info
- Publication number
- JPS63124747U JPS63124747U JP1540987U JP1540987U JPS63124747U JP S63124747 U JPS63124747 U JP S63124747U JP 1540987 U JP1540987 U JP 1540987U JP 1540987 U JP1540987 U JP 1540987U JP S63124747 U JPS63124747 U JP S63124747U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- handle
- handling device
- holding
- wafer holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1540987U JPS63124747U (fr) | 1987-02-04 | 1987-02-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1540987U JPS63124747U (fr) | 1987-02-04 | 1987-02-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63124747U true JPS63124747U (fr) | 1988-08-15 |
Family
ID=30806317
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1540987U Pending JPS63124747U (fr) | 1987-02-04 | 1987-02-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63124747U (fr) |
-
1987
- 1987-02-04 JP JP1540987U patent/JPS63124747U/ja active Pending
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