JPS63124735U - - Google Patents

Info

Publication number
JPS63124735U
JPS63124735U JP1697587U JP1697587U JPS63124735U JP S63124735 U JPS63124735 U JP S63124735U JP 1697587 U JP1697587 U JP 1697587U JP 1697587 U JP1697587 U JP 1697587U JP S63124735 U JPS63124735 U JP S63124735U
Authority
JP
Japan
Prior art keywords
reaction chamber
barrel
raw material
susceptor
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1697587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1697587U priority Critical patent/JPS63124735U/ja
Publication of JPS63124735U publication Critical patent/JPS63124735U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP1697587U 1987-02-07 1987-02-07 Pending JPS63124735U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1697587U JPS63124735U (enrdf_load_stackoverflow) 1987-02-07 1987-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1697587U JPS63124735U (enrdf_load_stackoverflow) 1987-02-07 1987-02-07

Publications (1)

Publication Number Publication Date
JPS63124735U true JPS63124735U (enrdf_load_stackoverflow) 1988-08-15

Family

ID=30809319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1697587U Pending JPS63124735U (enrdf_load_stackoverflow) 1987-02-07 1987-02-07

Country Status (1)

Country Link
JP (1) JPS63124735U (enrdf_load_stackoverflow)

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