JPS63124733U - - Google Patents
Info
- Publication number
- JPS63124733U JPS63124733U JP1697387U JP1697387U JPS63124733U JP S63124733 U JPS63124733 U JP S63124733U JP 1697387 U JP1697387 U JP 1697387U JP 1697387 U JP1697387 U JP 1697387U JP S63124733 U JPS63124733 U JP S63124733U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- cap
- barrel
- cvd apparatus
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002826 coolant Substances 0.000 claims description 2
- 238000010926 purge Methods 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697387U JPS63124733U (es) | 1987-02-07 | 1987-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697387U JPS63124733U (es) | 1987-02-07 | 1987-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124733U true JPS63124733U (es) | 1988-08-15 |
Family
ID=30809315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1697387U Pending JPS63124733U (es) | 1987-02-07 | 1987-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124733U (es) |
-
1987
- 1987-02-07 JP JP1697387U patent/JPS63124733U/ja active Pending