JPS63124732U - - Google Patents
Info
- Publication number
- JPS63124732U JPS63124732U JP1697287U JP1697287U JPS63124732U JP S63124732 U JPS63124732 U JP S63124732U JP 1697287 U JP1697287 U JP 1697287U JP 1697287 U JP1697287 U JP 1697287U JP S63124732 U JPS63124732 U JP S63124732U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- switching valve
- introduction pipe
- piping
- manifold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697287U JPS63124732U (enExample) | 1987-02-07 | 1987-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1697287U JPS63124732U (enExample) | 1987-02-07 | 1987-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124732U true JPS63124732U (enExample) | 1988-08-15 |
Family
ID=30809313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1697287U Pending JPS63124732U (enExample) | 1987-02-07 | 1987-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124732U (enExample) |
-
1987
- 1987-02-07 JP JP1697287U patent/JPS63124732U/ja active Pending