JPS63124665U - - Google Patents

Info

Publication number
JPS63124665U
JPS63124665U JP1657787U JP1657787U JPS63124665U JP S63124665 U JPS63124665 U JP S63124665U JP 1657787 U JP1657787 U JP 1657787U JP 1657787 U JP1657787 U JP 1657787U JP S63124665 U JPS63124665 U JP S63124665U
Authority
JP
Japan
Prior art keywords
piezoelectric
thin
peripheral portion
supporting member
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1657787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1657787U priority Critical patent/JPS63124665U/ja
Publication of JPS63124665U publication Critical patent/JPS63124665U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP1657787U 1987-02-09 1987-02-09 Pending JPS63124665U (US20070244113A1-20071018-C00087.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1657787U JPS63124665U (US20070244113A1-20071018-C00087.png) 1987-02-09 1987-02-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1657787U JPS63124665U (US20070244113A1-20071018-C00087.png) 1987-02-09 1987-02-09

Publications (1)

Publication Number Publication Date
JPS63124665U true JPS63124665U (US20070244113A1-20071018-C00087.png) 1988-08-15

Family

ID=30808562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1657787U Pending JPS63124665U (US20070244113A1-20071018-C00087.png) 1987-02-09 1987-02-09

Country Status (1)

Country Link
JP (1) JPS63124665U (US20070244113A1-20071018-C00087.png)

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