JPS63123674U - - Google Patents
Info
- Publication number
- JPS63123674U JPS63123674U JP1219987U JP1219987U JPS63123674U JP S63123674 U JPS63123674 U JP S63123674U JP 1219987 U JP1219987 U JP 1219987U JP 1219987 U JP1219987 U JP 1219987U JP S63123674 U JPS63123674 U JP S63123674U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- side plate
- boat
- base
- crystal growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000007493 shaping process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1219987U JPH052612Y2 (en:Method) | 1987-01-31 | 1987-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1219987U JPH052612Y2 (en:Method) | 1987-01-31 | 1987-01-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63123674U true JPS63123674U (en:Method) | 1988-08-11 |
| JPH052612Y2 JPH052612Y2 (en:Method) | 1993-01-22 |
Family
ID=30800108
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1219987U Expired - Lifetime JPH052612Y2 (en:Method) | 1987-01-31 | 1987-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH052612Y2 (en:Method) |
-
1987
- 1987-01-31 JP JP1219987U patent/JPH052612Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH052612Y2 (en:Method) | 1993-01-22 |