JPS63123674U - - Google Patents

Info

Publication number
JPS63123674U
JPS63123674U JP1987012199U JP1219987U JPS63123674U JP S63123674 U JPS63123674 U JP S63123674U JP 1987012199 U JP1987012199 U JP 1987012199U JP 1219987 U JP1219987 U JP 1219987U JP S63123674 U JPS63123674 U JP S63123674U
Authority
JP
Japan
Prior art keywords
quartz boat
side plate
boat
base
crystal growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987012199U
Other languages
English (en)
Japanese (ja)
Other versions
JPH052612Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987012199U priority Critical patent/JPH052612Y2/ja
Publication of JPS63123674U publication Critical patent/JPS63123674U/ja
Application granted granted Critical
Publication of JPH052612Y2 publication Critical patent/JPH052612Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
JP1987012199U 1987-01-31 1987-01-31 Expired - Lifetime JPH052612Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987012199U JPH052612Y2 (cg-RX-API-DMAC7.html) 1987-01-31 1987-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987012199U JPH052612Y2 (cg-RX-API-DMAC7.html) 1987-01-31 1987-01-31

Publications (2)

Publication Number Publication Date
JPS63123674U true JPS63123674U (cg-RX-API-DMAC7.html) 1988-08-11
JPH052612Y2 JPH052612Y2 (cg-RX-API-DMAC7.html) 1993-01-22

Family

ID=30800108

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987012199U Expired - Lifetime JPH052612Y2 (cg-RX-API-DMAC7.html) 1987-01-31 1987-01-31

Country Status (1)

Country Link
JP (1) JPH052612Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH052612Y2 (cg-RX-API-DMAC7.html) 1993-01-22

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