JPS63123666U - - Google Patents
Info
- Publication number
- JPS63123666U JPS63123666U JP1321587U JP1321587U JPS63123666U JP S63123666 U JPS63123666 U JP S63123666U JP 1321587 U JP1321587 U JP 1321587U JP 1321587 U JP1321587 U JP 1321587U JP S63123666 U JPS63123666 U JP S63123666U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- semiconductor wafer
- pot
- wafer
- inverts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1321587U JPS63123666U (OSRAM) | 1987-01-31 | 1987-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1321587U JPS63123666U (OSRAM) | 1987-01-31 | 1987-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63123666U true JPS63123666U (OSRAM) | 1988-08-11 |
Family
ID=30802066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1321587U Pending JPS63123666U (OSRAM) | 1987-01-31 | 1987-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63123666U (OSRAM) |
-
1987
- 1987-01-31 JP JP1321587U patent/JPS63123666U/ja active Pending