JPS63123648A - Fine movement mechanism for precision machine - Google Patents
Fine movement mechanism for precision machineInfo
- Publication number
- JPS63123648A JPS63123648A JP26856186A JP26856186A JPS63123648A JP S63123648 A JPS63123648 A JP S63123648A JP 26856186 A JP26856186 A JP 26856186A JP 26856186 A JP26856186 A JP 26856186A JP S63123648 A JPS63123648 A JP S63123648A
- Authority
- JP
- Japan
- Prior art keywords
- hollow structure
- fine movement
- movement mechanism
- fluid
- machine tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 23
- 239000012530 fluid Substances 0.000 claims abstract description 24
- 238000007789 sealing Methods 0.000 abstract description 8
- 230000008602 contraction Effects 0.000 abstract description 3
- 238000003754 machining Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- JHJNPOSPVGRIAN-SFHVURJKSA-N n-[3-[(1s)-1-[[6-(3,4-dimethoxyphenyl)pyrazin-2-yl]amino]ethyl]phenyl]-5-methylpyridine-3-carboxamide Chemical compound C1=C(OC)C(OC)=CC=C1C1=CN=CC(N[C@@H](C)C=2C=C(NC(=O)C=3C=C(C)C=NC=3)C=CC=2)=N1 JHJNPOSPVGRIAN-SFHVURJKSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は精密機械用のサブミクロンオーダーの微動機構
に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a submicron-order fine movement mechanism for precision machinery.
（従来技術）
従来の工作機械の位置決め機構は、サーボモータとボー
ルネジを組み合わせた方式がそのほとんどを占めていた
。しかし、この方式ではボールネジ嘉こ発生するガタ、
バックラッシ等により、高精度の加工切込を実現するこ
とは非常に困難であり、また精度を要求すればする程工
作機械のコストアップの大きな要因ともなっていた。(Prior Art) Most positioning mechanisms for conventional machine tools have been a combination of a servo motor and a ball screw. However, with this method, the backlash that occurs in the ball screw,
Due to backlash and other factors, it is extremely difficult to achieve a highly accurate machining depth of cut, and the higher the precision required, the greater the cost increase of the machine tool.
（発明の解決しようとする問題点及び発明の目的）サブ
ミクロンオーダーの加工精度を実現するためには、超精
密の位置決め機構をもつ工作機械が必要となる１本発明
は従来用いられている位置決め機構のもつ位置決め誤差
を、微小に補正するための微動機構を提供しようとする
ものである。(Problems to be Solved by the Invention and Objectives of the Invention) In order to achieve machining accuracy on the order of submicrons, a machine tool with an ultra-precise positioning mechanism is required. The present invention aims to provide a fine movement mechanism for minutely correcting the positioning error of the mechanism.
（発明による解決手段）
上下に平行フランジを備えた工作機械の構造体間に挟持
される中空構造体と、該中空構造体内に曳封される圧力
流体とからなり、流体圧を変化させることにより、中空
構造体の軸方向の変形を利用して微動機構を構成した。(Solving Means by the Invention) It consists of a hollow structure sandwiched between the structures of a machine tool equipped with upper and lower parallel flanges, and a pressurized fluid drawn and sealed inside the hollow structure, and by changing the fluid pressure. , a micro-motion mechanism was constructed using the axial deformation of a hollow structure.
（第１実施例）
第１図及第３図に基いて説明する。第１図で１及び１′
は工作機械構造体で、これら構造体内に微動機構Ａが挟
持されている。(First Example) This will be explained based on FIGS. 1 and 3. 1 and 1' in Figure 1
are machine tool structures, and a fine movement mechanism A is sandwiched within these structures.
微動機構Ａは有底筒状体よりなる中空構造体２と、該中
空構造体２の密閉蓋体３と、中空構造体２内へサーボ弁
５を介し圧力流体４を送り込む圧力流体源６とからなっ
ている。The fine movement mechanism A includes a hollow structure 2 made of a cylindrical body with a bottom, a sealing lid 3 of the hollow structure 2, and a pressure fluid source 6 for feeding pressure fluid 4 into the hollow structure 2 through a servo valve 5. It consists of
中空構造体２は上下に平行なフランジ２ａ、 ２ｂを有
し、これらフランジが工作機械構造体１，１′と接して
挟持される。The hollow structure 2 has vertically parallel flanges 2a and 2b, and these flanges are held in contact with the machine tool structures 1 and 1'.
（作用）
サーボ弁５により、中空構造体２と密閉蓋体３で液密に
された空間に流体の圧力を制御して供給することにより
、中空構造体２は第３図ａ）、ｂ）に示すように、底面
方向への伸びδ、と側面の伸びによる底面方向の縮みδ
２を発生する。δ１及びδ２はその伸び又は縮み量が微
小である領域では、はぼ圧力Ｐに比例する。したがって
全体の伸び量δはδ＝５１−６．＝ＫＰ（Ｋ：比例定数
）で表わされる。(Function) By controlling and supplying the fluid pressure to the space made liquid-tight by the hollow structure 2 and the sealing lid 3 using the servo valve 5, the hollow structure 2 is heated as shown in FIGS. 3a) and b). As shown in , the elongation δ in the direction of the bottom and the contraction δ in the direction of the bottom due to the elongation of the sides.
Generates 2. δ1 and δ2 are proportional to the warp pressure P in a region where the amount of expansion or contraction is minute. Therefore, the total elongation amount δ is δ=51-6. =KP (K: constant of proportionality).
（第２実施例） 第２図に基いて説明する。第１実施例と同様。(Second example) This will be explained based on FIG. Same as the first embodiment.
工作機械構造体１，１′の間に上下に平行フランジ２ａ
、２ｂを有する中空構造体２が挟持される。７は中空構
造体２内に嵌入された中間体で、該中間体は頂部を除い
て中空構造体２の内側面及び内底面との間に密封流体１
１封入用の隙間ａが存在するよう構成されている。又中
間体７は中心孔８を有し、該中心孔８内には圧電素子９
が嵌っている。A vertically parallel flange 2a is provided between the machine tool structures 1 and 1'.
, 2b is sandwiched. 7 is an intermediate body fitted into the hollow structure 2, and the intermediate body has a sealing fluid 1 between the inner surface and the inner bottom surface of the hollow structure 2 except for the top part.
The structure is such that there is a gap a for one enclosure. Further, the intermediate body 7 has a center hole 8, and a piezoelectric element 9 is placed inside the center hole 8.
is fitted.
１０は圧電素子９に対し圧力流体を完全密閉するための
ベローズである。Reference numeral 10 denotes a bellows for completely sealing the piezoelectric element 9 against pressure fluid.
（作用）
圧電素子９は作用する電圧にほぼ比例して、サブミクロ
ンオーダーの分解能で伸び量を制御できるアクチュエー
タである。圧電素子９の伸びによって密封流体１１内に
発生する圧力を利用して。(Function) The piezoelectric element 9 is an actuator that can control the amount of elongation with a resolution on the order of submicrons, almost in proportion to the applied voltage. Using the pressure generated within the sealing fluid 11 due to the expansion of the piezoelectric element 9.
中空構造体２の伸び量δを制御できる。全体の伸び量δ
はδ＝δ、−δ、＝ＫＥ （Ｋ；比例定数、Ｅ；圧電素
子印加電圧）で表わされる。The amount of elongation δ of the hollow structure 2 can be controlled. Total elongation δ
is expressed as δ=δ, -δ, =KE (K: constant of proportionality, E: voltage applied to the piezoelectric element).
上述した２つの実施例は共に流体圧を利用して中空構造
体２に弾性変形させ、この変形量を制御するようになっ
ている。このためガタ、パックラッシのない高分解能且
つ高速応答性を有するアクチュエータとして利用するこ
とができる。In both of the above-mentioned embodiments, the hollow structure 2 is elastically deformed using fluid pressure, and the amount of this deformation is controlled. Therefore, it can be used as an actuator with high resolution and high speed response without backlash or pack lash.
（応用例）
第４図はこの微動機構Ａを３ケ用いて平面研削盤に応用
した例を示す、１２はワークＷを研削する砥石で主軸モ
ータ１３によって駆動される。１４は左右方向軸粗動機
構用のモータ、１５は同じくボールねじで教る。１６は
上下方向軸粗動用のモータ、１７は同じくボールねじで
ある。(Application Example) FIG. 4 shows an example in which three fine movement mechanisms A are applied to a surface grinder. Reference numeral 12 denotes a grindstone for grinding a workpiece W, which is driven by a spindle motor 13. Reference numeral 14 is a motor for the left-right axis coarse movement mechanism, and reference numeral 15 is a ball screw. Reference numeral 16 designates a motor for coarse movement of the shaft in the vertical direction, and reference numeral 17 designates a ball screw.
３ケの微動機構Ａは夫々が平面でみて三角形の頂点に位
置するように配置されているので、これによりχ軸回り
の回転微動、Ｚ軸方向の直線微動を実現させることがで
きる。Since the three fine movement mechanisms A are arranged so that each one is located at the vertex of a triangle when viewed in a plane, it is possible to realize rotational fine movement around the χ axis and linear fine movement in the Z axis direction.
（効果）
工作機械構造体間に流体圧によって微少変形する中空構
造体よりなる微動機構を挟持させたので。(Effect) A fine movement mechanism made of a hollow structure that deforms slightly due to fluid pressure is sandwiched between the machine tool structures.
従来のサーボモータとボールねじによる高精度位置決め
機構等で不可避であったガタあるいはバックラッシ等が
なく、極めて精度の高い微動機構を得ることが可能とな
った。There is no backlash or backlash that is inevitable with conventional high-precision positioning mechanisms using servo motors and ball screws, making it possible to obtain an extremely precise fine movement mechanism.
構造的にも中空構造体と圧力流体あるいは公知圧電素子
等の組合せより構成されるだけであるからコスト的にも
有利である。Structurally, it is advantageous in terms of cost because it is simply composed of a combination of a hollow structure and a pressure fluid or a known piezoelectric element.
第１図は本発明に係る微動機構の第１実施例断面図。
第２図は同じく第２実施例断面図。
第３図（ａ） 、 （ｂ）は本発明の原理説明図。
第４図は本発明を平面研削盤への°応用例。
図においてフ
Ａ 微動機構
１ 工作機械構造体 ２ 中空構造体
２ａ、２ｂ フランジ ３ 密閉蓋体４ 圧力流
体 ５ サーボ弁
６ 圧力流体源 ７ 中間体
８ 中心孔 ９ 圧電素子
１０ ベローズ １１ 密封流体１２ 砥
石 １３ 主軸モータ１４ 左右軸粗動
用モータ
１５ ボールねじ
１６ 上下軸粗動用モータ
１７ ボールねじ
以上
出願人 住友重機械工業株式会社
復代理人 弁理士 大 橋 勇
第１図
第２図FIG. 1 is a sectional view of a first embodiment of a fine movement mechanism according to the present invention. FIG. 2 is a sectional view of the second embodiment. FIGS. 3(a) and 3(b) are diagrams explaining the principle of the present invention. Figure 4 shows an example of application of the present invention to a surface grinder. In the figure, F Fine movement mechanism 1 Machine tool structure 2 Hollow structure 2a, 2b Flange 3 Sealing lid 4 Pressure fluid 5 Servo valve 6 Pressure fluid source 7 Intermediate body 8 Center hole 9 Piezoelectric element 10 Bellows 11 Sealed fluid 12 Grinding wheel 13 Main shaft motor 14 Left and right axis coarse movement motor 15 Ball screw 16 Vertical axis coarse movement motor 17 Ball screw and above Applicant Sumitomo Heavy Industries, Ltd. sub-agent Patent attorney Isamu Ohashi Figure 1 Figure 2
Claims (3)
に挟持される中空構造体と、該中空構造体内に密封され
る圧力流体とからなり、流体圧を変化させることにより
、中空構造体の軸方向と軸と直交する方向への変形に起
因する軸方向伸び量を利用することを特徴とする精密機
械用微動機構。(1) Consisting of a hollow structure sandwiched between the structures of a machine tool equipped with upper and lower parallel flanges, and a pressure fluid sealed within the hollow structure, by changing the fluid pressure, the hollow structure A fine movement mechanism for precision machinery, characterized in that it utilizes the amount of axial elongation caused by deformation in the axial direction and in the direction orthogonal to the axis.
体を中空構造体内へ送るようにした前記特許請求の範囲
第１項記載の精密機械用微動機構。(2) The fine movement mechanism for a precision machine according to claim 1, wherein pressure fluid is sent into the hollow structure from a fluid source outside the hollow structure using a servo valve.
内に嵌装した圧電素子に電流を印加することにより封入
流体の圧を変化させることによって中空構造体を変形さ
せるようにした前記特許請求の範囲第１項記載の精密機
械用微動機構。(3) The patent described above in which a fluid is sealed in a hollow structure, and the hollow structure is deformed by changing the pressure of the sealed fluid by applying a current to a piezoelectric element fitted in the hollow structure. A fine movement mechanism for precision machinery according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26856186A JPS63123648A (en) | 1986-11-13 | 1986-11-13 | Fine movement mechanism for precision machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26856186A JPS63123648A (en) | 1986-11-13 | 1986-11-13 | Fine movement mechanism for precision machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63123648A true JPS63123648A (en) | 1988-05-27 |
Family
ID=17460237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26856186A Pending JPS63123648A (en) | 1986-11-13 | 1986-11-13 | Fine movement mechanism for precision machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63123648A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993009911A1 (en) * | 1991-11-15 | 1993-05-27 | Yotaro Hatamura | Feed screw device and precisely positioning micromotion feed system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5760918U (en) * | 1980-09-29 | 1982-04-10 |
-
1986
- 1986-11-13 JP JP26856186A patent/JPS63123648A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5760918U (en) * | 1980-09-29 | 1982-04-10 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1993009911A1 (en) * | 1991-11-15 | 1993-05-27 | Yotaro Hatamura | Feed screw device and precisely positioning micromotion feed system |
| US5644951A (en) * | 1991-11-15 | 1997-07-08 | Hatamura; Yotaro | Feed screw apparatus and precise positioning and fine feed system |
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