JPS63122605U - - Google Patents
Info
- Publication number
- JPS63122605U JPS63122605U JP1271387U JP1271387U JPS63122605U JP S63122605 U JPS63122605 U JP S63122605U JP 1271387 U JP1271387 U JP 1271387U JP 1271387 U JP1271387 U JP 1271387U JP S63122605 U JPS63122605 U JP S63122605U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- light
- vacuum
- window
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Degasification And Air Bubble Elimination (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1271387U JPS63122605U (enExample) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1271387U JPS63122605U (enExample) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63122605U true JPS63122605U (enExample) | 1988-08-09 |
Family
ID=30801100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1271387U Pending JPS63122605U (enExample) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122605U (enExample) |
-
1987
- 1987-01-30 JP JP1271387U patent/JPS63122605U/ja active Pending
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