JPS63122246U - - Google Patents
Info
- Publication number
- JPS63122246U JPS63122246U JP1330787U JP1330787U JPS63122246U JP S63122246 U JPS63122246 U JP S63122246U JP 1330787 U JP1330787 U JP 1330787U JP 1330787 U JP1330787 U JP 1330787U JP S63122246 U JPS63122246 U JP S63122246U
- Authority
- JP
- Japan
- Prior art keywords
- ultrapure water
- pressure
- pressure gauge
- water pipe
- partition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 8
- 239000012498 ultrapure water Substances 0.000 claims description 8
- 238000005192 partition Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 description 1
Description
第１図はこの考案の一実施例の超純水用圧力計
の断面図である。第２図は従来の超純水用圧力計
の断面図である。
１１……超純水用配管、１２……超純水用圧力
計、１３……可動隔壁、１４……圧力検知部、１
５……導圧管、１６……圧力表示部、１８……超
純水。
FIG. 1 is a sectional view of a pressure gauge for ultrapure water according to an embodiment of this invention. FIG. 2 is a sectional view of a conventional ultrapure water pressure gauge. 11... Piping for ultrapure water, 12... Pressure gauge for ultrapure water, 13... Movable bulkhead, 14... Pressure detection section, 1
5... Impulse tube, 16... Pressure display section, 18... Ultrapure water.
Claims (1)
純水用配管の近傍に可動隔壁を配設し、この隔壁
の変形に対応して圧力を表示する圧力表示部を設
けたことを特徴とする超純水用圧力計。 The pressure gauge connected to the ultrapure water pipe is characterized by having a movable partition near the ultrapure water pipe and a pressure display section that displays the pressure in response to the deformation of the partition. A pressure gauge for ultrapure water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1330787U JPS63122246U (en) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1330787U JPS63122246U (en) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63122246U true JPS63122246U (en) | 1988-08-09 |
Family
ID=30802247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1330787U Pending JPS63122246U (en) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63122246U (en) |
-
1987
- 1987-01-30 JP JP1330787U patent/JPS63122246U/ja active Pending