JPS63121445U - - Google Patents
Info
- Publication number
- JPS63121445U JPS63121445U JP1321687U JP1321687U JPS63121445U JP S63121445 U JPS63121445 U JP S63121445U JP 1321687 U JP1321687 U JP 1321687U JP 1321687 U JP1321687 U JP 1321687U JP S63121445 U JPS63121445 U JP S63121445U
- Authority
- JP
- Japan
- Prior art keywords
- scribe surface
- die
- reflected light
- scribe
- tested
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1321687U JPS63121445U (pl) | 1987-01-31 | 1987-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1321687U JPS63121445U (pl) | 1987-01-31 | 1987-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121445U true JPS63121445U (pl) | 1988-08-05 |
Family
ID=30802068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1321687U Pending JPS63121445U (pl) | 1987-01-31 | 1987-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121445U (pl) |
-
1987
- 1987-01-31 JP JP1321687U patent/JPS63121445U/ja active Pending
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