JPS63121436U - - Google Patents
Info
- Publication number
- JPS63121436U JPS63121436U JP1150487U JP1150487U JPS63121436U JP S63121436 U JPS63121436 U JP S63121436U JP 1150487 U JP1150487 U JP 1150487U JP 1150487 U JP1150487 U JP 1150487U JP S63121436 U JPS63121436 U JP S63121436U
- Authority
- JP
- Japan
- Prior art keywords
- section
- liquid
- filter
- storage
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 9
- 238000011084 recovery Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Weting (AREA)
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1150487U JPS63121436U (forum.php) | 1987-01-30 | 1987-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1150487U JPS63121436U (forum.php) | 1987-01-30 | 1987-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121436U true JPS63121436U (forum.php) | 1988-08-05 |
Family
ID=30798781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1150487U Pending JPS63121436U (forum.php) | 1987-01-30 | 1987-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121436U (forum.php) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61198723A (ja) * | 1985-02-28 | 1986-09-03 | Toshiba Corp | レジスト塗布装置 |
| JPS62211920A (ja) * | 1986-03-12 | 1987-09-17 | Toshiba Corp | レジスト液供給装置 |
-
1987
- 1987-01-30 JP JP1150487U patent/JPS63121436U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61198723A (ja) * | 1985-02-28 | 1986-09-03 | Toshiba Corp | レジスト塗布装置 |
| JPS62211920A (ja) * | 1986-03-12 | 1987-09-17 | Toshiba Corp | レジスト液供給装置 |