JPS63121433U - - Google Patents
Info
- Publication number
- JPS63121433U JPS63121433U JP1257687U JP1257687U JPS63121433U JP S63121433 U JPS63121433 U JP S63121433U JP 1257687 U JP1257687 U JP 1257687U JP 1257687 U JP1257687 U JP 1257687U JP S63121433 U JPS63121433 U JP S63121433U
- Authority
- JP
- Japan
- Prior art keywords
- clamping
- lever
- base body
- clamping members
- rotational force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 1
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257687U JPH0644094Y2 (ja) | 1987-01-30 | 1987-01-30 | 荷電粒子線装置に用いられるカセツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1257687U JPH0644094Y2 (ja) | 1987-01-30 | 1987-01-30 | 荷電粒子線装置に用いられるカセツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63121433U true JPS63121433U (en, 2012) | 1988-08-05 |
| JPH0644094Y2 JPH0644094Y2 (ja) | 1994-11-14 |
Family
ID=30800835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1257687U Expired - Lifetime JPH0644094Y2 (ja) | 1987-01-30 | 1987-01-30 | 荷電粒子線装置に用いられるカセツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0644094Y2 (en, 2012) |
-
1987
- 1987-01-30 JP JP1257687U patent/JPH0644094Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0644094Y2 (ja) | 1994-11-14 |