JPS63121432U - - Google Patents

Info

Publication number
JPS63121432U
JPS63121432U JP1294387U JP1294387U JPS63121432U JP S63121432 U JPS63121432 U JP S63121432U JP 1294387 U JP1294387 U JP 1294387U JP 1294387 U JP1294387 U JP 1294387U JP S63121432 U JPS63121432 U JP S63121432U
Authority
JP
Japan
Prior art keywords
reaction tube
protrusions
support ring
receiving
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1294387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510353Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1294387U priority Critical patent/JPH0510353Y2/ja
Publication of JPS63121432U publication Critical patent/JPS63121432U/ja
Application granted granted Critical
Publication of JPH0510353Y2 publication Critical patent/JPH0510353Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1294387U 1987-01-30 1987-01-30 Expired - Lifetime JPH0510353Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1294387U JPH0510353Y2 (en, 2012) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1294387U JPH0510353Y2 (en, 2012) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121432U true JPS63121432U (en, 2012) 1988-08-05
JPH0510353Y2 JPH0510353Y2 (en, 2012) 1993-03-15

Family

ID=30801544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1294387U Expired - Lifetime JPH0510353Y2 (en, 2012) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0510353Y2 (en, 2012)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297014A (ja) * 1988-10-03 1990-04-09 Tel Sagami Ltd 熱処理装置及びそのチューブ取付方法並びにそれに用いる治具
JP2008251927A (ja) * 2007-03-30 2008-10-16 Koyo Thermo System Kk 熱処理容器
JP2010027632A (ja) * 2008-07-15 2010-02-04 Shin Etsu Handotai Co Ltd 縦型熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0297014A (ja) * 1988-10-03 1990-04-09 Tel Sagami Ltd 熱処理装置及びそのチューブ取付方法並びにそれに用いる治具
JP2008251927A (ja) * 2007-03-30 2008-10-16 Koyo Thermo System Kk 熱処理容器
JP2010027632A (ja) * 2008-07-15 2010-02-04 Shin Etsu Handotai Co Ltd 縦型熱処理装置

Also Published As

Publication number Publication date
JPH0510353Y2 (en, 2012) 1993-03-15

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