JPS63121430U - - Google Patents

Info

Publication number
JPS63121430U
JPS63121430U JP1294187U JP1294187U JPS63121430U JP S63121430 U JPS63121430 U JP S63121430U JP 1294187 U JP1294187 U JP 1294187U JP 1294187 U JP1294187 U JP 1294187U JP S63121430 U JPS63121430 U JP S63121430U
Authority
JP
Japan
Prior art keywords
soaking tube
vertical furnace
sealed
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1294187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1294187U priority Critical patent/JPS63121430U/ja
Publication of JPS63121430U publication Critical patent/JPS63121430U/ja
Pending legal-status Critical Current

Links

JP1294187U 1987-01-30 1987-01-30 Pending JPS63121430U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1294187U JPS63121430U (US06272168-20010807-M00014.png) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1294187U JPS63121430U (US06272168-20010807-M00014.png) 1987-01-30 1987-01-30

Publications (1)

Publication Number Publication Date
JPS63121430U true JPS63121430U (US06272168-20010807-M00014.png) 1988-08-05

Family

ID=30801540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1294187U Pending JPS63121430U (US06272168-20010807-M00014.png) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPS63121430U (US06272168-20010807-M00014.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS62272525A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd 熱処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61114522A (ja) * 1984-11-09 1986-06-02 Hitachi Ltd 半導体ウエハ加熱装置
JPS62272525A (ja) * 1986-05-21 1987-11-26 Hitachi Ltd 熱処理装置

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