JPS63121045A - Photosensitive composition - Google Patents
Photosensitive compositionInfo
- Publication number
- JPS63121045A JPS63121045A JP26720386A JP26720386A JPS63121045A JP S63121045 A JPS63121045 A JP S63121045A JP 26720386 A JP26720386 A JP 26720386A JP 26720386 A JP26720386 A JP 26720386A JP S63121045 A JPS63121045 A JP S63121045A
- Authority
- JP
- Japan
- Prior art keywords
- group
- alkyl
- substituent
- aryl
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000203 mixture Substances 0.000 title claims description 22
- 125000000217 alkyl group Chemical group 0.000 claims abstract description 28
- 125000003118 aryl group Chemical group 0.000 claims abstract description 18
- 239000002253 acid Substances 0.000 claims abstract description 13
- 239000000178 monomer Substances 0.000 claims abstract description 5
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 4
- 150000002367 halogens Chemical class 0.000 claims abstract description 3
- 150000001875 compounds Chemical class 0.000 claims description 48
- 125000001424 substituent group Chemical group 0.000 claims description 14
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 10
- 125000003710 aryl alkyl group Chemical group 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 7
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 claims description 4
- 150000004945 aromatic hydrocarbons Chemical class 0.000 claims description 4
- 206010034972 Photosensitivity reaction Diseases 0.000 abstract description 7
- 230000036211 photosensitivity Effects 0.000 abstract description 7
- 150000002148 esters Chemical class 0.000 abstract description 3
- 239000004215 Carbon black (E152) Substances 0.000 abstract 1
- 229930195733 hydrocarbon Natural products 0.000 abstract 1
- 150000002430 hydrocarbons Chemical class 0.000 abstract 1
- -1 orthoquinone diazide compound Chemical class 0.000 description 27
- 229910052782 aluminium Inorganic materials 0.000 description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 10
- 125000004432 carbon atom Chemical group C* 0.000 description 10
- 229920005989 resin Polymers 0.000 description 10
- 239000011347 resin Substances 0.000 description 10
- 239000007788 liquid Substances 0.000 description 7
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 5
- WSFSSNUMVMOOMR-UHFFFAOYSA-N formaldehyde Substances O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 5
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 4
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 4
- 239000000975 dye Substances 0.000 description 4
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 4
- 229920002554 vinyl polymer Polymers 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical class C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- 150000001299 aldehydes Chemical class 0.000 description 3
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- FQPSGWSUVKBHSU-UHFFFAOYSA-N methacrylamide Chemical class CC(=C)C(N)=O FQPSGWSUVKBHSU-UHFFFAOYSA-N 0.000 description 3
- 150000002989 phenols Chemical class 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 2
- GJYCVCVHRSWLNY-UHFFFAOYSA-N 2-butylphenol Chemical compound CCCCC1=CC=CC=C1O GJYCVCVHRSWLNY-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical class CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 239000004115 Sodium Silicate Substances 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- HUMNYLRZRPPJDN-UHFFFAOYSA-N benzaldehyde Chemical compound O=CC1=CC=CC=C1 HUMNYLRZRPPJDN-UHFFFAOYSA-N 0.000 description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 2
- 125000004464 hydroxyphenyl group Chemical group 0.000 description 2
- RLSSMJSEOOYNOY-UHFFFAOYSA-N m-methyl-PhOH Natural products CC1=CC=CC(O)=C1 RLSSMJSEOOYNOY-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 125000005395 methacrylic acid group Chemical group 0.000 description 2
- RCALDWJXTVCBAZ-UHFFFAOYSA-N oct-1-enylbenzene Chemical compound CCCCCCC=CC1=CC=CC=C1 RCALDWJXTVCBAZ-UHFFFAOYSA-N 0.000 description 2
- 150000002896 organic halogen compounds Chemical class 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
- 229920001568 phenolic resin Polymers 0.000 description 2
- 238000006303 photolysis reaction Methods 0.000 description 2
- 230000015843 photosynthesis, light reaction Effects 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 2
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 2
- 229910052911 sodium silicate Inorganic materials 0.000 description 2
- 150000003440 styrenes Chemical class 0.000 description 2
- YBBRCQOCSYXUOC-UHFFFAOYSA-N sulfuryl dichloride Chemical compound ClS(Cl)(=O)=O YBBRCQOCSYXUOC-UHFFFAOYSA-N 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 125000003944 tolyl group Chemical group 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 2
- 229920001567 vinyl ester resin Polymers 0.000 description 2
- ONMLAAZEQUPQSE-UHFFFAOYSA-N (3-hydroxy-2,2-dimethylpropyl) 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC(C)(C)CO ONMLAAZEQUPQSE-UHFFFAOYSA-N 0.000 description 1
- SUTQSIHGGHVXFK-UHFFFAOYSA-N 1,2,2-trifluoroethenylbenzene Chemical compound FC(F)=C(F)C1=CC=CC=C1 SUTQSIHGGHVXFK-UHFFFAOYSA-N 0.000 description 1
- AGOFZVAQMFVJEQ-UHFFFAOYSA-N 1,2,3,4,5-pentachloro-6-ethenylbenzene Chemical compound ClC1=C(Cl)C(Cl)=C(C=C)C(Cl)=C1Cl AGOFZVAQMFVJEQ-UHFFFAOYSA-N 0.000 description 1
- WSLDOOZREJYCGB-UHFFFAOYSA-N 1,2-Dichloroethane Chemical compound ClCCCl WSLDOOZREJYCGB-UHFFFAOYSA-N 0.000 description 1
- XPXMCUKPGZUFGR-UHFFFAOYSA-N 1-chloro-2-(1,2,2-trichloroethenyl)benzene Chemical compound ClC(Cl)=C(Cl)C1=CC=CC=C1Cl XPXMCUKPGZUFGR-UHFFFAOYSA-N 0.000 description 1
- RPWJXFPSRAUGLN-UHFFFAOYSA-N 1-chloro-2-ethenoxybenzene Chemical class ClC1=CC=CC=C1OC=C RPWJXFPSRAUGLN-UHFFFAOYSA-N 0.000 description 1
- HWCLMKDWXUGDKL-UHFFFAOYSA-N 1-ethenoxy-2-ethoxyethane Chemical compound CCOCCOC=C HWCLMKDWXUGDKL-UHFFFAOYSA-N 0.000 description 1
- GXZPMXGRNUXGHN-UHFFFAOYSA-N 1-ethenoxy-2-methoxyethane Chemical compound COCCOC=C GXZPMXGRNUXGHN-UHFFFAOYSA-N 0.000 description 1
- NSOAQRMLVFRWIT-UHFFFAOYSA-N 1-ethenoxydecane Chemical compound CCCCCCCCCCOC=C NSOAQRMLVFRWIT-UHFFFAOYSA-N 0.000 description 1
- YAOJJEJGPZRYJF-UHFFFAOYSA-N 1-ethenoxyhexane Chemical compound CCCCCCOC=C YAOJJEJGPZRYJF-UHFFFAOYSA-N 0.000 description 1
- XXCVIFJHBFNFBO-UHFFFAOYSA-N 1-ethenoxyoctane Chemical compound CCCCCCCCOC=C XXCVIFJHBFNFBO-UHFFFAOYSA-N 0.000 description 1
- VBICKXHEKHSIBG-UHFFFAOYSA-N 1-monostearoylglycerol Chemical compound CCCCCCCCCCCCCCCCCC(=O)OCC(O)CO VBICKXHEKHSIBG-UHFFFAOYSA-N 0.000 description 1
- HGOUNPXIJSDIKV-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)butyl 2-methylprop-2-enoate Chemical compound CCC(CO)(CO)COC(=O)C(C)=C HGOUNPXIJSDIKV-UHFFFAOYSA-N 0.000 description 1
- SYENVBKSVVOOPS-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)butyl prop-2-enoate Chemical compound CCC(CO)(CO)COC(=O)C=C SYENVBKSVVOOPS-UHFFFAOYSA-N 0.000 description 1
- CYLVUSZHVURAOY-UHFFFAOYSA-N 2,2-dibromoethenylbenzene Chemical compound BrC(Br)=CC1=CC=CC=C1 CYLVUSZHVURAOY-UHFFFAOYSA-N 0.000 description 1
- CISIJYCKDJSTMX-UHFFFAOYSA-N 2,2-dichloroethenylbenzene Chemical compound ClC(Cl)=CC1=CC=CC=C1 CISIJYCKDJSTMX-UHFFFAOYSA-N 0.000 description 1
- PWESSVUYESFKBH-UHFFFAOYSA-N 2,2-dimethoxyethenylbenzene Chemical compound COC(OC)=CC1=CC=CC=C1 PWESSVUYESFKBH-UHFFFAOYSA-N 0.000 description 1
- BUZAXYQQRMDUTM-UHFFFAOYSA-N 2,4,4-trimethylpentan-2-yl prop-2-enoate Chemical compound CC(C)(C)CC(C)(C)OC(=O)C=C BUZAXYQQRMDUTM-UHFFFAOYSA-N 0.000 description 1
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 1
- WULAHPYSGCVQHM-UHFFFAOYSA-N 2-(2-ethenoxyethoxy)ethanol Chemical compound OCCOCCOC=C WULAHPYSGCVQHM-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- UIUSRIAANRCPGF-UHFFFAOYSA-N 2-(ethenoxymethyl)oxolane Chemical compound C=COCC1CCCO1 UIUSRIAANRCPGF-UHFFFAOYSA-N 0.000 description 1
- GOXQRTZXKQZDDN-UHFFFAOYSA-N 2-Ethylhexyl acrylate Chemical compound CCCCC(CC)COC(=O)C=C GOXQRTZXKQZDDN-UHFFFAOYSA-N 0.000 description 1
- RCSBILYQLVXLJG-UHFFFAOYSA-N 2-Propenyl hexanoate Chemical compound CCCCCC(=O)OCC=C RCSBILYQLVXLJG-UHFFFAOYSA-N 0.000 description 1
- PZGMUSDNQDCNAG-UHFFFAOYSA-N 2-Propenyl octanoate Chemical compound CCCCCCCC(=O)OCC=C PZGMUSDNQDCNAG-UHFFFAOYSA-N 0.000 description 1
- XIHNGTKOSAPCSP-UHFFFAOYSA-N 2-bromo-1-ethenyl-4-(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=C(C=C)C(Br)=C1 XIHNGTKOSAPCSP-UHFFFAOYSA-N 0.000 description 1
- SBYMUDUGTIKLCR-UHFFFAOYSA-N 2-chloroethenylbenzene Chemical compound ClC=CC1=CC=CC=C1 SBYMUDUGTIKLCR-UHFFFAOYSA-N 0.000 description 1
- WHBAYNMEIXUTJV-UHFFFAOYSA-N 2-chloroethyl prop-2-enoate Chemical compound ClCCOC(=O)C=C WHBAYNMEIXUTJV-UHFFFAOYSA-N 0.000 description 1
- PLWQJHWLGRXAMP-UHFFFAOYSA-N 2-ethenoxy-n,n-diethylethanamine Chemical compound CCN(CC)CCOC=C PLWQJHWLGRXAMP-UHFFFAOYSA-N 0.000 description 1
- JWCDUUFOAZFFMX-UHFFFAOYSA-N 2-ethenoxy-n,n-dimethylethanamine Chemical compound CN(C)CCOC=C JWCDUUFOAZFFMX-UHFFFAOYSA-N 0.000 description 1
- VUIWJRYTWUGOOF-UHFFFAOYSA-N 2-ethenoxyethanol Chemical compound OCCOC=C VUIWJRYTWUGOOF-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- DDBYLRWHHCWVID-UHFFFAOYSA-N 2-ethylbut-1-enylbenzene Chemical compound CCC(CC)=CC1=CC=CC=C1 DDBYLRWHHCWVID-UHFFFAOYSA-N 0.000 description 1
- KBKNKFIRGXQLDB-UHFFFAOYSA-N 2-fluoroethenylbenzene Chemical compound FC=CC1=CC=CC=C1 KBKNKFIRGXQLDB-UHFFFAOYSA-N 0.000 description 1
- ZRUOTKQBVMWMDK-UHFFFAOYSA-N 2-hydroxy-6-methylbenzaldehyde Chemical compound CC1=CC=CC(O)=C1C=O ZRUOTKQBVMWMDK-UHFFFAOYSA-N 0.000 description 1
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 1
- OZPOYKXYJOHGCW-UHFFFAOYSA-N 2-iodoethenylbenzene Chemical compound IC=CC1=CC=CC=C1 OZPOYKXYJOHGCW-UHFFFAOYSA-N 0.000 description 1
- CTHJQRHPNQEPAB-UHFFFAOYSA-N 2-methoxyethenylbenzene Chemical compound COC=CC1=CC=CC=C1 CTHJQRHPNQEPAB-UHFFFAOYSA-N 0.000 description 1
- BTOVVHWKPVSLBI-UHFFFAOYSA-N 2-methylprop-1-enylbenzene Chemical compound CC(C)=CC1=CC=CC=C1 BTOVVHWKPVSLBI-UHFFFAOYSA-N 0.000 description 1
- HKADMMFLLPJEAG-UHFFFAOYSA-N 3,3,3-trifluoroprop-1-enylbenzene Chemical compound FC(F)(F)C=CC1=CC=CC=C1 HKADMMFLLPJEAG-UHFFFAOYSA-N 0.000 description 1
- WDGNEDMGRQQNNI-UHFFFAOYSA-N 3-(ethenoxymethyl)pentane Chemical compound CCC(CC)COC=C WDGNEDMGRQQNNI-UHFFFAOYSA-N 0.000 description 1
- IWTYTFSSTWXZFU-UHFFFAOYSA-N 3-chloroprop-1-enylbenzene Chemical compound ClCC=CC1=CC=CC=C1 IWTYTFSSTWXZFU-UHFFFAOYSA-N 0.000 description 1
- FWLGYSGTHHKRMZ-UHFFFAOYSA-N 3-ethenoxy-2,2-dimethylbutane Chemical compound CC(C)(C)C(C)OC=C FWLGYSGTHHKRMZ-UHFFFAOYSA-N 0.000 description 1
- BJOWTLCTYPKRRU-UHFFFAOYSA-N 3-ethenoxyoctane Chemical compound CCCCCC(CC)OC=C BJOWTLCTYPKRRU-UHFFFAOYSA-N 0.000 description 1
- VCYDIDJFXXIUCY-UHFFFAOYSA-N 3-ethoxyprop-1-enylbenzene Chemical compound CCOCC=CC1=CC=CC=C1 VCYDIDJFXXIUCY-UHFFFAOYSA-N 0.000 description 1
- CEBRPXLXYCFYGU-UHFFFAOYSA-N 3-methylbut-1-enylbenzene Chemical compound CC(C)C=CC1=CC=CC=C1 CEBRPXLXYCFYGU-UHFFFAOYSA-N 0.000 description 1
- ZTHJQCDAHYOPIK-UHFFFAOYSA-N 3-methylbut-2-en-2-ylbenzene Chemical compound CC(C)=C(C)C1=CC=CC=C1 ZTHJQCDAHYOPIK-UHFFFAOYSA-N 0.000 description 1
- AIMDYNJRXHEXEL-UHFFFAOYSA-N 3-phenylprop-1-enylbenzene Chemical compound C=1C=CC=CC=1CC=CC1=CC=CC=C1 AIMDYNJRXHEXEL-UHFFFAOYSA-N 0.000 description 1
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 1
- JMOIDWXRUSAWHV-UHFFFAOYSA-N 4-ethenyl-1-fluoro-2-(trifluoromethyl)benzene Chemical compound FC1=CC=C(C=C)C=C1C(F)(F)F JMOIDWXRUSAWHV-UHFFFAOYSA-N 0.000 description 1
- GVGQXTJQMNTHJX-UHFFFAOYSA-N 4-ethenyl-1-methoxy-2-methylbenzene Chemical compound COC1=CC=C(C=C)C=C1C GVGQXTJQMNTHJX-UHFFFAOYSA-N 0.000 description 1
- YKXAYLPDMSGWEV-UHFFFAOYSA-N 4-hydroxybutyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCO YKXAYLPDMSGWEV-UHFFFAOYSA-N 0.000 description 1
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 1
- YGTVWCBFJAVSMS-UHFFFAOYSA-N 5-hydroxypentyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCCCCO YGTVWCBFJAVSMS-UHFFFAOYSA-N 0.000 description 1
- INRQKLGGIVSJRR-UHFFFAOYSA-N 5-hydroxypentyl prop-2-enoate Chemical compound OCCCCCOC(=O)C=C INRQKLGGIVSJRR-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
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- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 238000006862 quantum yield reaction Methods 0.000 description 1
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical compound [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 1
- 229940043267 rhodamine b Drugs 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- WBHQBSYUUJJSRZ-UHFFFAOYSA-M sodium bisulfate Chemical compound [Na+].OS([O-])(=O)=O WBHQBSYUUJJSRZ-UHFFFAOYSA-M 0.000 description 1
- 229910000342 sodium bisulfate Inorganic materials 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-O sulfonium Chemical compound [SH3+] RWSOTUBLDIXVET-UHFFFAOYSA-O 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- MUTNCGKQJGXKEM-UHFFFAOYSA-N tamibarotene Chemical compound C=1C=C2C(C)(C)CCC(C)(C)C2=CC=1NC(=O)C1=CC=C(C(O)=O)C=C1 MUTNCGKQJGXKEM-UHFFFAOYSA-N 0.000 description 1
- ILJSQTXMGCGYMG-UHFFFAOYSA-N triacetic acid Chemical compound CC(=O)CC(=O)CC(O)=O ILJSQTXMGCGYMG-UHFFFAOYSA-N 0.000 description 1
- 229940001496 tribasic sodium phosphate Drugs 0.000 description 1
- 125000004953 trihalomethyl group Chemical group 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/075—Silicon-containing compounds
- G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
- G03F7/0758—Macromolecular compounds containing Si-O, Si-C or Si-N bonds with silicon- containing groups in the side chains
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、平版印刷版、多色印刷の校正刷、オーバーヘ
ッドプロジェクタ−用図面、IC回路、フォトマスクの
製造に適するポジ型の感光性組成物に関する。更に詳し
くは、オルトキノンジアジド化合物を感光性成分として
含む感光性組成物に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention provides a positive photosensitive composition suitable for the production of lithographic printing plates, multicolor printing proofs, drawings for overhead projectors, IC circuits, and photomasks. relating to things. More specifically, the present invention relates to a photosensitive composition containing an orthoquinone diazide compound as a photosensitive component.
活性光線により可溶化する、いわゆるポジティブに作用
する感光性物質としては、従来オルトキノンジアジド化
合物が知られており、実際に平版印刷版、フォトレジス
ト等に広く利用されてきた。Orthoquinone diazide compounds have been known as so-called positively acting photosensitive substances that are solubilized by actinic rays, and have actually been widely used in lithographic printing plates, photoresists, and the like.
このようなオルトキノンジアジド化合物としては、例え
ば米国特許第2,766、118号、同第2.767.
092号、同第2.772,972号、同第2.859
,112号、同第2.907.665号、同第3,04
6.110号、同第3.046,111号、同第3.0
46.115号、同第3.046.118号、同第3.
046,119号、同第3.046.120号、同第3
.046.121号、同第3.046.122号、同第
3,046.123号、同第3.061.430号、同
第3.102.809号、同第3.106.465号、
同第3.635.709号、同第3.647.443号
の各公報をはじめ、多数の刊行物に記されている。Examples of such orthoquinone diazide compounds include, for example, U.S. Pat. Nos. 2,766,118 and 2,767.
No. 092, No. 2.772,972, No. 2.859
, No. 112, No. 2.907.665, No. 3,04
No. 6.110, No. 3.046,111, No. 3.0
46.115, 3.046.118, 3.
No. 046,119, No. 3.046.120, No. 3
.. 046.121, 3.046.122, 3,046.123, 3.061.430, 3.102.809, 3.106.465,
It is described in numerous publications, including the publications No. 3.635.709 and No. 3.647.443.
これらのオルトキノンジアジド化合物は、活性光線の照
射により分解を起こして5員環のカルボン酸を生じ、ア
ルカリ可溶性となることを利用したものであるが、いず
れも感光性が不十分であるという欠点を有する。これは
、オルトキノンジアジド化合物の場合、本質的に量子収
率が1を越えないということに由来するものである。These orthoquinonediazide compounds are decomposed by irradiation with actinic rays to produce a five-membered carboxylic acid, which makes them soluble in alkali, but all of them have the disadvantage of insufficient photosensitivity. have This is because, in the case of orthoquinone diazide compounds, the quantum yield essentially does not exceed 1.
オルトキノンジアジド化合物を含む感光性組成物の感光
性を高める方法については、今までいろいろと試みられ
てきたが、現像時の現像許容性を保持したまま感光性を
高めることは非常に困難であった。例えば、このような
試みの例として、特公昭48−12242号、特開昭5
2−40125号、米国特許第4.307.173号な
どの公報に記載された内容を挙げることができる。Various attempts have been made to increase the photosensitivity of photosensitive compositions containing orthoquinonediazide compounds, but it has been extremely difficult to increase photosensitivity while maintaining development tolerance during development. . For example, examples of such attempts include Japanese Patent Publication No. 48-12242 and Japanese Patent Publication No. 5
Examples include contents described in publications such as No. 2-40125 and U.S. Pat. No. 4.307.173.
本発明の目的は、これらの問題点が解決された新規な感
光性組成物を提供することである。即ち高い感光性を有
し、現像時の現像許容性が広い新規な感光性組成物を提
供することである。An object of the present invention is to provide a novel photosensitive composition in which these problems are solved. That is, the object of the present invention is to provide a novel photosensitive composition that has high photosensitivity and wide development latitude during development.
本発明の更に別の目的は、製造が簡便で容易に取得でき
る新規な感光性組成物を提供することである。Yet another object of the present invention is to provide a novel photosensitive composition that is simple to manufacture and easily obtainable.
本発明者は、上記目的を達成すべく鋭意検討を加えた結
果新規なポジ型の感光性組成物を用いることで前記目的
が達成されることを見い出し本発明に到達した。As a result of intensive studies to achieve the above object, the present inventors discovered that the above object could be achieved by using a novel positive-type photosensitive composition, and arrived at the present invention.
即ち本発明は、
(a) 下記一般式(I)で示される1、2−ナフト
キノン−2−ジアジド−4−スルホン酸エステル化合物
及び1.2−ナフトキノン−2−ジアジド−5−スルホ
ン酸エステル化合物からなる群より選ばれた少くとも一
種の花台物〔化合物(a)〕、(b) 活性光線の照
射により酸を発生し得る化合物〔化合物(b))、及び
(C) 下記一般式(I[)で示されるモノマーから
由来される構造単位を少なくとも1モル%有し、現像液
中でのその溶解度が酸の作用により増大する高分子化合
物〔化合物(C)〕、を含有する怒光性組成物を提供す
るものである。That is, the present invention provides (a) a 1,2-naphthoquinone-2-diazido-4-sulfonic acid ester compound and a 1,2-naphthoquinone-2-diazido-5-sulfonic acid ester compound represented by the following general formula (I). At least one type of flower stand selected from the group consisting of [compound (a)], (b) a compound capable of generating an acid upon irradiation with actinic light [compound (b)), and (C) the following general formula (I A photoresist containing a polymer compound [compound (C)] having at least 1 mol% of a structural unit derived from the monomer represented by [) and whose solubility in a developer increases by the action of an acid. A composition is provided.
式中Rは一価の脂肪族又は芳香族炭化水素を示す。In the formula, R represents a monovalent aliphatic or aromatic hydrocarbon.
R1は水素原子、ハロゲン、もしくは置換基を有してい
てもよいアルキル基を示す。好ましくは水素原子、又は
置換基を有していてもよいアルキル基、更に好ましくは
水素原子又はメチル基を示す。R2、R3、R,は同一
でも相異していてもよく、それぞれ水素原子、置換基を
有していてもよいアルキル、アリール、もしくはアラル
キル、又は−0R3を示す。好ましくは置換基を有して
いてもよいアルキル、アリール、もしくはアラルキル基
を示す。R3は置換基を有していてもよいアルキル、ア
リール、もしくはアラルキル基を示す。好まししくは炭
素数1〜8個のアルキル、又は炭素数6〜15個の了り
−ル基を示す。Aは単結合、−0−R,−CO−1もし
くは
ていてもよい2価の脂肪族又は芳香族炭化水素を示す。R1 represents a hydrogen atom, a halogen, or an alkyl group which may have a substituent. Preferably a hydrogen atom or an alkyl group which may have a substituent, more preferably a hydrogen atom or a methyl group. R2, R3, and R may be the same or different, and each represents a hydrogen atom, alkyl, aryl, or aralkyl that may have a substituent, or -0R3. Preferably, it represents an alkyl, aryl, or aralkyl group that may have a substituent. R3 represents an alkyl, aryl, or aralkyl group which may have a substituent. Preferably, it represents an alkyl group having 1 to 8 carbon atoms or an alkyl group having 6 to 15 carbon atoms. A represents a single bond, -0-R, -CO-1, or an optionally divalent aliphatic or aromatic hydrocarbon.
R,は水素原子、置換基を有していてもよいアルキル、
アリール、もしくはアラルキル、又は−〇〇−RSを示
す。好ましくは水素原子、炭素数1〜4個のアルキル、
もしくは−Go−R。R is a hydrogen atom, alkyl which may have a substituent,
Indicates aryl, aralkyl, or -〇〇-RS. Preferably a hydrogen atom, an alkyl having 1 to 4 carbon atoms,
Or -Go-R.
を示す。R.は置換基を有していてもよいアルキル、ア
リール、もしくはアラルキル基を示す。好ましくは炭素
数1〜4個のアルキル、又は炭素数6〜10個のアリー
ル基を示す。shows. R. represents an alkyl, aryl, or aralkyl group that may have a substituent. Preferably, it represents an alkyl group having 1 to 4 carbon atoms or an aryl group having 6 to 10 carbon atoms.
化企勉里
本発明の[alに用いられる一般式(I)で示される化
合物は、一般にスルホニルクロライド等のハロゲノスル
ホニル基を4位又は5位に有する1。The compound represented by the general formula (I) used in [al] of the present invention generally has a halogenosulfonyl group such as sulfonyl chloride at the 4th or 5th position.
2−ナフトキノン−2−ジアジド化合物と、モノ又はポ
リヒドロキシフェニル化合物との化学的な縮合で得られ
るスルホン酸エステル化合物として表わすことができる
。それ故、−C式(I)中のRは、縮合相手のモノ又は
ポリヒドロキシフェニル化合物の残基を示している。It can be expressed as a sulfonic acid ester compound obtained by chemical condensation of a 2-naphthoquinone-2-diazide compound and a mono- or polyhydroxyphenyl compound. Therefore, R in -C formula (I) represents the residue of a mono- or polyhydroxyphenyl compound to be condensed.
このような、モノ又はポリヒドロキシフェニル化合物と
して一例を挙げると、2.2′−ジヒドロキシ−ジフェ
ニル、2. 2’, 4. 4’−テトラヒドロ
キシジフェニル、2,3−ジヒドロキシナフタリン、2
,3.4−1リヒドロキシベンゾフエノン、2.2’,
4.4’−テトラヒドロキシベンゾフェノン、p−t−
ブチルフェノール等があり、他にもその例は数多い。そ
れらのうちで米国特許第3,046, 120号公轄に
記載されているフェノール−ホルムアルデヒド樹脂また
は、0 −、m−、又はp−タレゾール−ホルムアルデ
ヒド樹脂などの比較的高分子量の化合物は皮膜形成性に
富む等の点で優れており、本発明の化合物(a)に対し
適する。Examples of such mono- or polyhydroxyphenyl compounds include 2.2'-dihydroxy-diphenyl;2', 4. 4'-tetrahydroxydiphenyl, 2,3-dihydroxynaphthalene, 2
, 3.4-1 lyhydroxybenzophenone, 2.2',
4.4'-tetrahydroxybenzophenone, pt-
Examples include butylphenol, and there are many other examples. Among them, relatively high molecular weight compounds such as phenol-formaldehyde resins or 0-, m-, or p-talesol-formaldehyde resins described in U.S. Pat. No. 3,046,120 are film-forming. It is excellent in terms of high properties and is suitable for the compound (a) of the present invention.
また同じく特開昭56−1045号公報、特開昭56−
1044号公報、特公昭43−28403号公報および
特公昭49−24361号公報等に開示された多価フェ
ノール類とアルデヒド・ケトン類との縮合物、特開昭5
9−84238号公報、特開昭59−84239号公報
に開示されたカテコール、レゾルシン、又はハイドロキ
ノンと置換フェノール類とのアルデヒド・ケトン類によ
る共縮合物、特開昭60−31138号公報記載の置換
フェノールとベンズアルデヒドとの縮合物のほか、フェ
ノールと0−、m−、又はp−クレゾール等の置換フェ
ノールとのアルデヒド・ケトン類による共縮合物、p−
ヒドロキシスチレンポリマー等も本発明の化合物(a)
に対し有効に使用される。Also, JP-A-56-1045 and JP-A-56-1045
Condensates of polyhydric phenols and aldehydes/ketones disclosed in Japanese Patent Publication No. 1044, Japanese Patent Publication No. 43-28403, Japanese Patent Publication No. 49-24361, etc.;
Co-condensates of catechol, resorcinol, or hydroquinone and substituted phenols with aldehydes and ketones disclosed in JP-A No. 9-84238 and JP-A-59-84239; substitutions described in JP-A-60-31138; In addition to condensates of phenol and benzaldehyde, cocondensates of phenol and substituted phenols such as 0-, m-, or p-cresol with aldehydes and ketones, p-
Hydroxystyrene polymers and the like are also compounds (a) of the present invention.
It is effectively used for
本発明の化合物(alの好ましい含有量は、感光性組成
物の全固形分に対して5〜40wt%である。The preferred content of the compound (al) of the present invention is 5 to 40 wt% based on the total solid content of the photosensitive composition.
±介立阿
本発明の山)における活性光線の照射により酸を発生し
得る化合物としては、多くの公知化合物及び混合物、例
えば、ジアゾニウム、ホスホニウム、スルホニウム、及
びヨードニウムのBP、−、PF、” 。Compounds that can generate acids upon irradiation with actinic rays include many known compounds and mixtures, such as diazonium, phosphonium, sulfonium, and iodonium BP, -, PF.
SbF&−、5iFb−、Cj! 04−などの塩、有
機ハロゲン化合物、オルトキノンジアジドスルホニルク
ロリド、及び有機金属/有機ハロゲン化合物組合せ物が
適当である。もちろん、米国特許第3.779.778
号及び西ドイツ国特許第2.610.842号の公報中
に記載された光分解により酸を発生させる化合物も化合
物(b)として適する。更に適当な染料と組合せて露光
の際、未露光部と露光物の間に可視的コントラストを与
えることを目的とした化合物、例えば特開昭55−77
742号、同57−163234号の公報に記載された
化合物も化合物中)として使用することができる。SbF&-, 5iFb-, Cj! Salts such as 04-, organohalogen compounds, orthoquinonediazide sulfonyl chloride, and organometallic/organohalogen compound combinations are suitable. Of course, U.S. Patent No. 3.779.778
Also suitable as compound (b) are the compounds which generate acids by photolysis as described in German Patent Application No. 2,610,842. Furthermore, compounds intended to provide a visible contrast between the unexposed area and the exposed object during exposure in combination with a suitable dye, such as JP-A-55-77
Compounds described in Publications No. 742 and No. 57-163234 can also be used as compounds).
上記光分解により酸を発生し得る化合物の中で、代表的
なものについて以下に説明する。Among the above-mentioned compounds capable of generating acid through photolysis, typical ones will be explained below.
(I)トリハロメチル基が置換した下記の一般式(II
I)で表わされるオキサジアゾール3M ”4体又は−
1式(IV)で表わされる5−1−リアジン誘導体ここ
て式中、R1は置換もしくは無置換のアリール、アルケ
ニル基、R1゜はR,、−cxi又は、置換もしくは無
置換のアルキル基を示す。Xは塩素原子又は臭素原子を
示す。(I) The following general formula (II) substituted with a trihalomethyl group
I) Oxadiazole 3M "4 body or -
1 5-1-Ryazine derivative represented by formula (IV) where R1 represents a substituted or unsubstituted aryl or alkenyl group, R1° represents R,, -cxi or a substituted or unsubstituted alkyl group . X represents a chlorine atom or a bromine atom.
具体的には以下に示すものが挙げられる。Specifically, the following may be mentioned.
(I[[−1)
(I[−2)
(I[[−3)
(II[−4)
(It−5)
([[[−6)
(III−7)
(I[[−8)
(TV−1)
(IV−2)
(IV−3)
(IV−4)
(IV−5)
(IV−6)
(IV−7)
CC1゜
(IV−8)
CC1゜
(It/−9)
CN3
CI
(2)下記の一般式(V)で表わされるヨードニウム塩
又は一般式(Vl)で表わされるスルホニウム塩
ここで式中Ar15 Artは同一でも相異していても
よく、置換又は無置換の芳香族基を示す。R11、R1
□、R11は同一でも相異していてもよく置換又は無置
換のアルキル基、芳香族基を示す。X−はBFh−、P
Fi−、ASF&−,5bFh−、CJ!04−を示す
。(I[[-1) (I[-2) (I[[-3) (II[-4) (It-5) ([[[-6) (III-7) (I[[-8) (TV-1) (IV-2) (IV-3) (IV-4) (IV-5) (IV-6) (IV-7) CC1° (IV-8) CC1° (It/-9) CN3 CI (2) An iodonium salt represented by the following general formula (V) or a sulfonium salt represented by the general formula (Vl), where Ar15 Art in the formula may be the same or different, and may be substituted or unsubstituted. Indicates an aromatic group. R11, R1
□ and R11 may be the same or different and represent a substituted or unsubstituted alkyl group or aromatic group. X- is BFh-, P
Fi-, ASF&-, 5bFh-, CJ! 04- is shown.
また、R,、、R,t、R,、のうちの2つ及びAr、
、Ar2はそれぞれ単結合又は置換基を介して結合して
もよい。Also, two of R, , R, t, R, and Ar,
, Ar2 may each be bonded via a single bond or a substituent.
−C式(V)で示される化合物としては、例えば特開昭
50−158680号、特開昭51−100716号、
及び特公昭52−14277号公報記載の化合物が挙げ
られる。また一般式(Vl)で示される化合物としては
、例えば特開昭51−56885号、特公昭52−14
278号、米国特許第4,442.197号、西独特許
第2.904,626号の各公報または明細書中に記載
の化合物が挙げられる。-C Compounds represented by formula (V) include, for example, JP-A-50-158680, JP-A-51-100716,
and compounds described in Japanese Patent Publication No. 52-14277. Further, as the compound represented by the general formula (Vl), for example, JP-A No. 51-56885, JP-A No. 52-14
No. 278, US Pat. No. 4,442.197, and West German Patent No. 2.904,626.
具体的には以下に示すものが含まれる。Specifically, the following are included.
(V−1)
(V−2)
(V−3)
(V−4)
(V−5)
(V−6)
(V−7)
(V−8)
(V−9)
(V−10)
(V−11)
+
(V−12)
+
(Vl−1)
(V[−2)
(Vl−3)
(Vl−4)
(V[−5)
(Vl−6)
(VI−7)
(Vl−8)
(Vl−9)
(VI−10)
(VI−11)
(VI−12)
(Vl−13)
(Vl−14)
(Vl−15)
(3)下記の一般式(■)で表わされるジスルホン誘導
体又は一般式(■)で表わされるイミドスルホネート誘
導体
Arc SOx SO2Ar4(■)グ
ここで式中、Ar、、Ar、は同一でも相異していても
よく、置換又は無置換の了り−ル基を示す。(V-1) (V-2) (V-3) (V-4) (V-5) (V-6) (V-7) (V-8) (V-9) (V-10) (V-11) + (V-12) + (Vl-1) (V[-2) (Vl-3) (Vl-4) (V[-5) (Vl-6) (VI-7) ( Vl-8) (Vl-9) (VI-10) (VI-11) (VI-12) (Vl-13) (Vl-14) (Vl-15) (3) In the following general formula (■) A disulfone derivative represented by the formula (■) or an imidosulfonate derivative represented by the general formula (■) Arc SOx SO2Ar4 (■) Represents a ryl group.
R14は置換又は無置換のアルキル、アリール基を示す
。Zは置換又は無置換のアルキレン、アルケニレン、ア
リーレン基を示す。R14 represents a substituted or unsubstituted alkyl or aryl group. Z represents a substituted or unsubstituted alkylene, alkenylene, or arylene group.
具体的には以下に示す化合物が挙げられる。Specifically, the compounds shown below are mentioned.
(■−1)
(■−2)
(■−3)
(■−4)
(■−5)
(■−6)
(■−7)
(■−1)
(■−4)
(■−5)
(■−6)
(■−7)
(■−8)
(■−9)
(■−10)
(■−11)
(■−12)
上記本発明の化合物(b)の含有量は、感光性組成物の
全固形分に対して0.01〜10wt%、好ましくは0
.1〜8賀t%である。(■-1) (■-2) (■-3) (■-4) (■-5) (■-6) (■-7) (■-1) (■-4) (■-5) (■-6) (■-7) (■-8) (■-9) (■-10) (■-11) (■-12) The content of the compound (b) of the present invention is 0.01 to 10 wt% based on the total solid content of the composition, preferably 0
.. 1 to 8 t%.
止立立(9)
本発明(C)の高分子化合物を構成する、−i式(n)
で示されるモノマーとしては、例えば次に示すものが含
まれる。Standing (9) -i formula (n) constituting the polymer compound of the present invention (C)
Examples of monomers represented by include the following.
(II−1) (n −2) (n−3) (n −4) (n−5) (n−6) (n−7) \。H3 (II −8) (n−9) (II−10) し、 tl S (n−11) (II−12) (II−13) (n−14) (n −15) H2 (n−16) (If−17) (II−19) (II−20) (II−21) (n−22) (II−23) なお具体例中のRは水素原子又はメチル基を示す。(II-1) (n-2) (n-3) (n-4) (n-5) (n-6) (n-7) \. H3 (II-8) (n-9) (II-10) , tl S (n-11) (II-12) (II-13) (n-14) (n-15) H2 (n-16) (If-17) (II-19) (II-20) (II-21) (n-22) (II-23) Note that R in the specific examples represents a hydrogen atom or a methyl group.
本発明(c)に用いられる高分子化合物は、一般式(I
f)で示されるモノマーの単独重合体として使用するこ
とができるが、更に別の重合可能なエチレン性不飽和結
合を有する化合物(I種以上)との2元以上の共重合体
の形で用いてもよい。The polymer compound used in the present invention (c) has the general formula (I
It can be used as a homopolymer of the monomer shown in f), but it can also be used in the form of a two or more copolymer with another polymerizable compound having an ethylenically unsaturated bond (Type I or more). It's okay.
好適な重合可能なエチレン性不飽和結合を有する化合物
としては、以下に示すものが含まれる。Suitable compounds having a polymerizable ethylenically unsaturated bond include those shown below.
例えばアクリル酸エステル類、アクリルアミド顛、メタ
クリル酸エステル類、メタクリルアミド類、アリル化合
物、ビニルエーテル類、ビニルエステル類、スチレン類
、クロトン酸エステル類などから選ばれる付加重合性不
飽和結合を1個有する化合物である。具体的には、例え
ばアクリル酸エステル類、例えばアルキル(該アルキル
基の炭素原子数は1〜10のものが好ましい)アクリレ
ート(例えばアクリル酸メチル、アクリル酸エチル、ア
クリル酸プロピル、アクリル酸ブチル、アクリル酸アミ
ル、アクリル酸エチルヘキシル、アクリル酸オクチル、
アクリル酸−t−オクチル、クロルエチルアクリレート
、2−ヒドロキシエチルアクリレ−1−12,2−ジメ
チルヒドロキシプロピルアクリレート、5−ヒドロキシ
ペンチルアクリレート、トリメチロールプロパンモノア
クリレート、ペンタエリスリトールモノアクリレート、
グリシジルアクリレート、ベンジルアクリレート、メト
キシベンジルアクリレート、フルフリルアクリレート、
テトラヒドロフルフリルアクリレート、など)、アリー
ルアクリレート(例えばフェニルアクリレートなど);
メタクリル酸エステル類、例えば、アルキル(該アルキ
ル基の炭素原子数は1〜10のものが好ましい)メタク
リレート(例えばメチルメタクリレート、エチルメタク
リレート、プロピルメタクリレート、イソプロピルメタ
クリレート、アミルメタクリレート、ヘキシルメタクリ
レート、シクロへキシルメタクリレート、ベンジルメタ
クリレート、クロルベンジルメタクリレート、オクチル
メタクリレート、2−ヒドロキシエチルメタクリレート
、4−ヒドロキシブチルメタクリレート、5−ヒドロキ
シペンチルメタクリレート、2,2−ジメチル−3−ヒ
ドロキシプロピルメタクリレート、トリメチロールプロ
パンモノメタクリレート、ペンタエリスリトールモノメ
タクリレート、グリシジルメタクリレート、フルフリル
メタクリレート、テトラヒドロフルフリルメタクリレー
トなど)、了り−ルメタクリレート(例えば、フェニル
メタクリレート、タレジルメタクリレート、ナフチルメ
タクリレートなど)アクリルアミド類、例えばアクリル
アミド、N−アルキルアクリルアミド、(該アルキル基
としては、炭素原子数1〜10のもの、例えばメチル基
、エチル基、プロピル基、ブチル基、t−ブチル基、ヘ
プチル基、オクチル基、シクロヘキシル基、ベンジル基
、ヒドロキシエチル基、ベンジル基などがある。)、N
−アリールアクリルアミド、(核子り−ル基としては、
例えばフェニル基、トリル基、ニトロフェニル基、ナフ
チル基、シアノフェニル基、ヒドロキシフェニル基など
がある。)、N、N−ジアルキルアクリルアミド(該ア
ルキル基としては、炭素原子数1〜10のもの、例えば
メチル基、エチル基、ブチル基、イソブチル基、エチル
ヘキシル基、シクロヘキシル基などがある。)、N、N
−アリールアクリルアミド(該アリール基としては、例
えばフェニル基などがある。)、N−メチル−N−フェ
ニルアクリルアミド、N−ヒドロキシエチル−N−メチ
ルアクリルアミド、N−2−アセトアミドエチル−N−
アセチルアクリルアミドなど;メタクリルアミド類、例
えばメタクリルアミド、N−アルキルメタクリルアミド
(該アルキル基としては、炭素原子数1〜10のもの、
例えばメチル基、エチル基、t−ブチル基、エチルヘキ
シル基、ヒドロキシエチル基、シクロヘキシル基などが
ある。)、N−アリールメタクリルアミド(該アリール
基としては、フェニル基、ヒドロキシフェニル基などが
ある。) 、N、N−ジアルキルメタクリルアミド(
該アルキル基としては、エチル基、プロピル基、ブチル
基などがある。)N、N−ジアリールメタクリルアミド
(該アリール基としては、フェニル基などがある。)、
N−ヒドロキシエチル−N−メチルメタクリルアミド、
N−メチル−N−フェニルメタクリルアミド、N−エチ
ル−N−フェニルメタクリルアミドなど;アリル化合物
、例えばアリルエステル類(例えば酢酸アリル、カプロ
ン酸アリル、カプリル酸アリル、ラウリン酸アリル、バ
ルミチン酸アリル、ステアリン酸アリル、安息香酸アリ
ル、アセト酢酸アリル、乳酸アリルなど)、アリルオキ
シエタノールなど;ビニルエーテル類、例えばアルキル
ビニルエーテル(例えばヘキシルビニルエーテル、オク
チルビニルエーテル、デシルビニルエーテル、エチルヘ
キシルビニルエーテル、メトキシエチルビニルエーテル
、エトキシエチルビニルエーテル、クロルエチルビニル
エーテル、1−メチル−2,2−ジメチルプロピルビニ
ルエーテル、2−エチルブチルビニルエーテル、ヒドロ
キシエチルビニルエーテル、ジエチレングリコールビニ
ルエーテル、ジメチルアミノエチルビニルエーテル、ジ
エチルアミノエチルビニルエーテル、ブチルアミノエチ
ルビニルエーテル、ベンジルビニルエーテル、テトラヒ
ドロフルフリルビニルエーテルなど)、ビニル了り−ル
エーテル(例えばビニルフェニルエーテル、ビニルトリ
ルエーテル、ビニルクロルフェニルエーテル、ビニル−
2,4−ジクロルフェニルエーテル、ビニルナフチルエ
ーテル、ビニルアントラニルエーテルなど);ビニルエ
ステル類、例えばビニルブチレート、ビニルイソブチレ
ート、ビニルトリメチルアセテート、ビニルジエチルア
セテート、ビニルバレート、ビニルカプロエート、ビニ
ルクロルアセテート、ビニルジクロルアセテート、ビニ
ルメトキシアセテート、ビニルブトキシアセテート、ビ
ニルフェニル7セテート、ビニルアセトアセテート、ビ
ニルラクテート、ビニル−β−フェニルブチレート、ビ
ニルシクロへキシルカルボキシレート、安息香酸ビニル
、サルチル酸ビニル、クロル安息香酸ビニル、テトラク
ロル安息香酸ビニル、ナフトエ酸ビニルなど;スチレン
類、例えばスチレン、アルキルスチレン(例えばメチル
スチレン、ジメチルスチレン、トリメチルスチレン、エ
チルスチレン、ジエチルスチレン、イソプロピルスチレ
ン、ブチルスチレン、ヘキシルスチレン、シクロへキシ
ルスチレン、デシルスチレン、ベンジルスチレン、クロ
ルメチルスチレン、トリフルオルメチルスチレン、エト
キシメチルスチレン、アセトキシメチルスチレンなど)
、アルコキシスチレン(例えばメトキシスチレン、4−
メトキシ−3−メチルスチレン、ジメトキシスチレンな
ど)、ハロゲンスチレン(例えばクロルスチレン、ジク
ロルスチレン、トリクロルスチレン、テトラクロルスチ
レン、ペンタクロルスチレン、ブロモスチレン、ジブロ
ムスチレン、ヨードスチレン、フルオルスチレン、トリ
フルオルスチレン、2−ブロム−4−トリフルオルメチ
ルスチレン、4−フルオル−3−トリフルオルメチルス
チレンなど);クロトン酸エステル類、例えば、クロト
ン酸アルキル(例えばクロトン酸ブチル、クロトン酸ヘ
キシル、グリセリンモノクロトネートなど);イタコン
酸ジアルキル類(例えばイタコン酸ジメチル、イタコン
酸ジエチル、イタコン酸ジブチルなど);マレイン酸あ
るいはフマール酸のジアルキル類(例えばジメチルマレ
レート、ジブチルフマレートなど);アクリル酸、メタ
クリル酸、アクリロニトリル、メタクリロニトリル等が
ある。その他、一般的には前記一般式(n)で示される
化合物と共重合可能である付加重合性不飽和化合物であ
ればよい。For example, a compound having one addition-polymerizable unsaturated bond selected from acrylic esters, acrylamide frames, methacrylic esters, methacrylamides, allyl compounds, vinyl ethers, vinyl esters, styrenes, crotonic esters, etc. It is. Specifically, examples include acrylic esters such as alkyl (the alkyl group preferably has 1 to 10 carbon atoms) acrylates (such as methyl acrylate, ethyl acrylate, propyl acrylate, butyl acrylate, acrylic amyl acid, ethylhexyl acrylate, octyl acrylate,
t-octyl acrylate, chloroethyl acrylate, 2-hydroxyethyl acrylate-1-12,2-dimethylhydroxypropyl acrylate, 5-hydroxypentyl acrylate, trimethylolpropane monoacrylate, pentaerythritol monoacrylate,
glycidyl acrylate, benzyl acrylate, methoxybenzyl acrylate, furfuryl acrylate,
tetrahydrofurfuryl acrylate, etc.), aryl acrylates (e.g. phenyl acrylate, etc.);
Methacrylic acid esters, such as alkyl (the alkyl group preferably has 1 to 10 carbon atoms) methacrylate (such as methyl methacrylate, ethyl methacrylate, propyl methacrylate, isopropyl methacrylate, amyl methacrylate, hexyl methacrylate, cyclohexyl methacrylate) , benzyl methacrylate, chlorobenzyl methacrylate, octyl methacrylate, 2-hydroxyethyl methacrylate, 4-hydroxybutyl methacrylate, 5-hydroxypentyl methacrylate, 2,2-dimethyl-3-hydroxypropyl methacrylate, trimethylolpropane monomethacrylate, pentaerythritol mono methacrylate, glycidyl methacrylate, furfuryl methacrylate, tetrahydrofurfuryl methacrylate, etc.), oryl methacrylate (e.g., phenyl methacrylate, talesyl methacrylate, naphthyl methacrylate, etc.), acrylamides, such as acrylamide, N-alkylacrylamide, (the alkyl group Examples include those having 1 to 10 carbon atoms, such as methyl group, ethyl group, propyl group, butyl group, t-butyl group, heptyl group, octyl group, cyclohexyl group, benzyl group, hydroxyethyl group, benzyl group, etc. ), N
-arylacrylamide, (as the nucleol group,
Examples include phenyl group, tolyl group, nitrophenyl group, naphthyl group, cyanophenyl group, and hydroxyphenyl group. ), N, N-dialkylacrylamide (the alkyl group includes those having 1 to 10 carbon atoms, such as methyl group, ethyl group, butyl group, isobutyl group, ethylhexyl group, cyclohexyl group, etc.), N, N
-arylacrylamide (such aryl groups include, for example, phenyl groups), N-methyl-N-phenylacrylamide, N-hydroxyethyl-N-methylacrylamide, N-2-acetamidoethyl-N-
acetylacrylamide, etc.; methacrylamides, such as methacrylamide, N-alkyl methacrylamide (the alkyl group includes those having 1 to 10 carbon atoms,
Examples include methyl group, ethyl group, t-butyl group, ethylhexyl group, hydroxyethyl group, and cyclohexyl group. ), N-arylmethacrylamide (the aryl group includes phenyl group, hydroxyphenyl group, etc.), N,N-dialkylmethacrylamide (
Examples of the alkyl group include ethyl group, propyl group, and butyl group. ) N,N-diarylmethacrylamide (the aryl group includes a phenyl group, etc.),
N-hydroxyethyl-N-methylmethacrylamide,
N-methyl-N-phenylmethacrylamide, N-ethyl-N-phenylmethacrylamide, etc.; allyl compounds, such as allyl esters (such as allyl acetate, allyl caproate, allyl caprylate, allyl laurate, allyl valmitate, stearin); vinyl ethers, such as alkyl vinyl ethers (such as hexyl vinyl ether, octyl vinyl ether, decyl vinyl ether, ethylhexyl vinyl ether, methoxyethyl vinyl ether, ethoxyethyl vinyl ether, chloro); Ethyl vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethyl butyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, dimethylaminoethyl vinyl ether, diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether, tetrahydrofurfuryl vinyl ether, etc. ), vinyl ethers (e.g. vinyl phenyl ether, vinyl tolyl ether, vinyl chlorphenyl ether, vinyl
vinyl esters such as vinyl butyrate, vinyl isobutyrate, vinyl trimethyl acetate, vinyl diethyl acetate, vinyl barate, vinyl caproate, vinyl Chloracetate, vinyl dichloroacetate, vinyl methoxy acetate, vinyl butoxy acetate, vinyl phenyl 7acetate, vinyl acetoacetate, vinyl lactate, vinyl-β-phenyl butyrate, vinyl cyclohexyl carboxylate, vinyl benzoate, vinyl salicylate, Vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthoate, etc.; styrenes, such as styrene, alkylstyrenes (such as methylstyrene, dimethylstyrene, trimethylstyrene, ethylstyrene, diethylstyrene, isopropylstyrene, butylstyrene, hexylstyrene, cyclo (hexylstyrene, decylstyrene, benzylstyrene, chloromethylstyrene, trifluoromethylstyrene, ethoxymethylstyrene, acetoxymethylstyrene, etc.)
, alkoxystyrene (e.g. methoxystyrene, 4-
methoxy-3-methylstyrene, dimethoxystyrene, etc.), halogen styrenes (e.g. chlorstyrene, dichlorostyrene, trichlorstyrene, tetrachlorostyrene, pentachlorstyrene, bromostyrene, dibromostyrene, iodostyrene, fluorostyrene, trifluorostyrene) styrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro-3-trifluoromethylstyrene, etc.); crotonate esters, such as alkyl crotonate (e.g. butyl crotonate, hexyl crotonate, glycerin monocrotonate); Dialkyl itaconates (e.g. dimethyl itaconate, diethyl itaconate, dibutyl itaconate, etc.); Dialkyl maleic acid or fumarate (e.g. dimethyl maleate, dibutyl fumarate, etc.); Acrylic acid, methacrylic acid, acrylonitrile , methacrylonitrile, etc. In addition, addition polymerizable unsaturated compounds that are generally copolymerizable with the compound represented by the general formula (n) may be used.
本発明の高分子化合物(C)の含有量は、感光性組成物
の全固形分に対して5〜95−t%、好ましくは10〜
70賀t%である。The content of the polymer compound (C) of the present invention is 5 to 95-t%, preferably 10 to 95-t%, based on the total solid content of the photosensitive composition.
70 days t%.
天皇血夏底光
本発明の感光性組成物は前記化合物(a1,(bl及び
(C)のみの成分により使用できるが、好ましくは更に
アルカリ可溶性樹脂を含有させた組成物で使用される。The photosensitive composition of the present invention can be used with only the above-mentioned compounds (a1, (bl and (C)), but is preferably used in a composition further containing an alkali-soluble resin.
好適なアルカリ可溶性樹脂としては、ノボラック型フェ
ノール樹脂、具体的にはフェノール−ホルムアルデヒド
樹脂、0−タレゾール−ホルムアルデヒド樹11、m−
クレゾール−ホルムアルデヒド樹脂、p−タレゾール−
ホルムアルデヒド樹脂、またはこれらの共縮合物などが
ある。更にカルボキシル基又はフェノール基を有するア
クリル樹脂、メタクリル樹脂、ポリウレタン樹脂、ポリ
ビニルアセクール樹脂、−ポリスチレン系樹脂なども使
用することができる。これらの樹脂は2種以上を併用し
てもよい。Suitable alkali-soluble resins include novolac-type phenolic resins, specifically phenol-formaldehyde resins, 0-talesol-formaldehyde resins 11, m-
Cresol-formaldehyde resin, p-talesol-
Examples include formaldehyde resins and co-condensates thereof. Furthermore, acrylic resins, methacrylic resins, polyurethane resins, polyvinyl acecool resins, -polystyrene resins, and the like having carboxyl groups or phenol groups can also be used. Two or more of these resins may be used in combination.
アルカリ可溶性樹脂が含有される場合、その含量は感光
性組成物の全固形分に対し30〜90wt%、好ましく
は50〜80wt%である。When the alkali-soluble resin is contained, its content is 30 to 90 wt%, preferably 50 to 80 wt%, based on the total solid content of the photosensitive composition.
本発明の感光性組成物には必要に応じて、更に染料、顔
料、可塑剤及び前記酸を発生し得る化合物の酸発生効率
を増大させる化合物(所謂増感剤)などを含有させるこ
とができる。好適な染料としては油溶性染料及び塩基性
染料がある。具体的には、オイルイエロー#101、オ
イルイエロー#130、オイルピンク#312、オイル
グリーンBG、オイルブルーBO3,オイルブルー#6
03、オイルブラックBY、オイルブラックBS、オイ
ルブラックT−505(以上、オリエント化学工業株式
会社製)クリスタルバイオレフト(c)42555)、
メチルバイオレット(c)42535)、ローダミンB
(CI45170B)マラカイトグリーン(CI42
000)、メチレンブルー(CI52015)などをあ
げることができる。The photosensitive composition of the present invention may further contain dyes, pigments, plasticizers, compounds that increase the acid generation efficiency of the acid-generating compound (so-called sensitizer), etc., as necessary. . Suitable dyes include oil-soluble dyes and basic dyes. Specifically, oil yellow #101, oil yellow #130, oil pink #312, oil green BG, oil blue BO3, oil blue #6
03, Oil Black BY, Oil Black BS, Oil Black T-505 (all manufactured by Orient Chemical Industry Co., Ltd.) Crystal Bioleft (c) 42555),
Methyl violet (c) 42535), Rhodamine B
(CI45170B) Malachite Green (CI42
000), methylene blue (CI52015), etc.
本発明の感光性組成物は、上記各成分を溶解する溶媒に
溶かして支持体上に塗布する。ここで使用する溶媒とし
ては、エチレンジクロライド、シクロヘキサノン、メチ
ルエチルケトン、エチレングリコールモノメチルエーテ
ル、エチレングリコールモノエチルエーテル、2−メト
キシエチルアセテート、1−メトキシ−2−プロパツー
ル、1−メトキシ−2−プロピルアセテート、トルエン
、酢酸エチルなどがあり、これらの溶媒を単独あるいは
混合して使用する。そして上記成分中の濃度(添加物を
含む全固形分)は、2〜50wt%である。また、塗布
量は用途により異なるが、例えば感光性平版印刷版につ
いていえば一般的に固形分として0.5〜3.0g−n
fが好ましい。塗布量が少なくなるにつれ感光性は大に
なるが、感光膜の物性は低下する。The photosensitive composition of the present invention is applied onto a support after being dissolved in a solvent that dissolves each of the above components. The solvents used here include ethylene dichloride, cyclohexanone, methyl ethyl ketone, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, 2-methoxyethyl acetate, 1-methoxy-2-propanol, 1-methoxy-2-propylacetate, Examples include toluene and ethyl acetate, and these solvents can be used alone or in combination. The concentration of the above components (total solid content including additives) is 2 to 50 wt%. The coating amount varies depending on the application, but for example, for photosensitive planographic printing plates, the solid content is generally 0.5 to 3.0 g-n.
f is preferred. As the coating amount decreases, the photosensitivity increases, but the physical properties of the photosensitive film deteriorate.
支祢体等
本発明の感光性組成物を用いて平版印刷版を製造する場
合、その支持体としては、親水化処理したアルミニウム
板、たとえばシリケート処理アルミニウム板、陽極酸化
アルミニウム板、砂目立てしたアルミニウム板、シリケ
ート電着したアルミニウム板があり、その他面鉛板、ス
テンレス板、クローム処理網板、親水化処理したプラス
チックフィルムや紙を上げることができる。When producing a lithographic printing plate using the photosensitive composition of the present invention, the support may be an aluminum plate treated with hydrophilic treatment, such as a silicate-treated aluminum plate, an anodized aluminum plate, or a grained aluminum plate. There are plates, silicate electrodeposited aluminum plates, surface lead plates, stainless steel plates, chrome-treated mesh plates, hydrophilic treated plastic films and paper.
また印刷用校正版、オーバーヘッドプロジェクタ−用フ
ィルム第2原図用フィルムの製造に適する支持体として
はポリエチレンテレフタレートフィルム、トリアセテー
トフィルム等の透明フィルムや、これらのプラスチック
フィルムの表面を化学的あるいは物理的にマット化した
ものをあげることが出来る。フォトマスク用フィルムの
製造に適する支持体としてはアルミニウム、アルミニウ
ム合金やクロムを蒸着させたポリエチレンテレフタレー
トフィルムや着色層をもうけたポリエチレンテレフタレ
ートフィルムをあげることが出来る。Supports suitable for producing printing proof plates, films for overhead projectors, and films for second originals include transparent films such as polyethylene terephthalate film and triacetate film, and the surfaces of these plastic films are matted chemically or physically. I can give you what I have transformed into. Supports suitable for producing photomask films include polyethylene terephthalate films deposited with aluminum, aluminum alloys, and chromium, and polyethylene terephthalate films provided with colored layers.
またフォトレジストとして上記以外の種々の支持体、例
えば銅板、銅メツキ板、ガラス板上に本発明の感光性組
成物を塗布して使用される。The photosensitive composition of the present invention can also be used as a photoresist by coating it on various supports other than those mentioned above, such as copper plates, copper-plated plates, and glass plates.
本発明に用いられる活性光線の光層としては例えば、水
銀灯、メタルハライドランプ、キセノンランプ、ケミカ
ルランプ、カーボンアーク灯などがある。また高密度エ
ネルギービーム(レーザービーム又は電子線)による走
査露光も本発明に使用することができる。このようなレ
ーザービームとしてはヘリウム・ネオンレーザ−、アル
ゴンレーザー、クリプトンイオンレーザ−、ヘリウム・
カドミウムレーザーなどが挙げられる。Examples of the active light layer used in the present invention include mercury lamps, metal halide lamps, xenon lamps, chemical lamps, and carbon arc lamps. Scanning exposure with a high-density energy beam (laser beam or electron beam) can also be used in the present invention. Such laser beams include helium neon lasers, argon lasers, krypton ion lasers, and helium neon lasers.
Examples include cadmium lasers.
本発明の感光性組成物に対する現像液としては、珪酸ナ
トリウム、珪酸カリウム、水酸化ナトリウム、水酸化カ
リウム、水酸化リチウム、第三リン酸ナトリウム、第ニ
リン酸ナトリウム、第三リン酸アンモニウム、第ニリン
酸アンモニウム、メタ珪酸ナトリウム、重炭酸ナトリウ
ム、アンモニア水などのような無機アルカリ剤の水溶液
が適当であり、それらの濃度が0.1〜10wt%、好
ましくは0.5〜5wt%になるように添加される。Examples of developing solutions for the photosensitive composition of the present invention include sodium silicate, potassium silicate, sodium hydroxide, potassium hydroxide, lithium hydroxide, tribasic sodium phosphate, dibasic sodium phosphate, tribasic ammonium phosphate, dibasic diphosphate, Aqueous solutions of inorganic alkaline agents such as ammonium acid, sodium metasilicate, sodium bicarbonate, aqueous ammonia, etc. are suitable, with their concentrations ranging from 0.1 to 10 wt%, preferably from 0.5 to 5 wt%. added.
また、該アルカリ性水溶液には、必要に応じ界面活性剤
やアルコールなどのような有機溶媒を加えることもでき
る。Moreover, a surfactant and an organic solvent such as alcohol can be added to the alkaline aqueous solution as required.
以下、本発明を合成例と実施例により更に詳細に説明す
るが、本発明の内容がこれにより限定されるものではな
い。Hereinafter, the present invention will be explained in more detail with reference to Synthesis Examples and Examples, but the content of the present invention is not limited thereto.
合成例(化合物例(II−8)(R=CHコ)とベンジ
ルメタクリレートの共重合体の合成)ジメチルフェニル
シリルメタクリレート35.3g (0゜160モル)
、ベンジルメタクリレート7.1g(0,040モル)
を2−メトキシエタノール120m1!に溶解し、窒素
気流下70℃に加熱した後、α、α′−アゾビスイソブ
チロニトリル0、25 gを加えて8時間重合反応を行
った。Synthesis example (synthesis of copolymer of compound example (II-8) (R=CH) and benzyl methacrylate) 35.3 g (0°160 mol) of dimethylphenylsilyl methacrylate
, benzyl methacrylate 7.1 g (0,040 mol)
120ml of 2-methoxyethanol! After heating to 70°C under a nitrogen stream, 0.25 g of α,α'-azobisisobutyronitrile was added and a polymerization reaction was carried out for 8 hours.
反応終了後、反応溶液を水3I!中に攪拌しながら注ぎ
、生じた白色沈殿を濾取乾燥して共重合体38、3 g
を得た。After the reaction is complete, add 3I of water to the reaction solution! The resulting white precipitate was filtered and dried to obtain 38.3 g of copolymer.
I got it.
一昨11〜4び六11
厚さ0.24菖朧の2Sアルミニウム板を80℃に保っ
た第3燐酸ナトリウムの10%水溶液に3分間浸漬して
脱脂し、ナイロンブラシで砂目立てした後アルミン酸ナ
トリウムで約10秒間エツチングして、硫酸水素ナトリ
ウム3%水溶液でデスマット処理を行った。このアルミ
ニウム板を20%硫酸中で電流密度2A/dII+”に
おいて2分間陽極酸化を行いアルミニウム板を作製した
。A 2S aluminum plate with a thickness of 0.24 irises was immersed in a 10% aqueous solution of tertiary sodium phosphate for 3 minutes to degrease it, and then grained with a nylon brush. The film was etched with sodium chloride for about 10 seconds, and then desmutted with a 3% aqueous solution of sodium hydrogen sulfate. This aluminum plate was anodized in 20% sulfuric acid at a current density of 2 A/dII+'' for 2 minutes to produce an aluminum plate.
次に下記感光液(A)の本発明の化合物(C)の種類を
変えて、4種類の感光液(A)−1〜(A)−4を調整
し、この感光液を陽極酸化されたアルミニウム板の上に
塗布し、100℃で2分間乾燥して、それぞれの感光性
平版印刷版(A)−1〜(A)−4を作製した。このと
きの塗布量は全て乾燥重量で2. Og / rdであ
った。Next, four types of photosensitive liquids (A)-1 to (A)-4 were prepared by changing the type of compound (C) of the present invention in photosensitive liquid (A) below, and this photosensitive liquid was anodized. Each of the photosensitive planographic printing plates (A)-1 to (A)-4 was prepared by applying the coating onto an aluminum plate and drying at 100° C. for 2 minutes. All coating amounts at this time are dry weight. It was Og/rd.
また感光液(A)−1〜(A)−4に用いた本発明の化
合物(C)は第1表に示す。The compounds (C) of the present invention used in photosensitive solutions (A)-1 to (A)-4 are shown in Table 1.
感光液(A)
次に比較例として下記の感光液CB)を感光液(A)と
同様に塗布し、感光性平版印刷版(B)を作製した。Photosensitive liquid (A) Next, as a comparative example, the following photosensitive liquid CB) was applied in the same manner as photosensitive liquid (A) to prepare a photosensitive planographic printing plate (B).
感光液(B)
乾燥後の塗布重量は2. Og / rdであった。感
光性平版印刷版(A)−1〜(A)−4、及びCB)の
感光層上に濃度差0.15のグレースケールを密着させ
、30アンペアのカーボンアーク灯で70cmの距離か
ら露光を行った。Photosensitive liquid (B) The coating weight after drying is 2. It was Og/rd. A gray scale with a density difference of 0.15 was brought into close contact with the photosensitive layer of photosensitive lithographic printing plates (A)-1 to (A)-4 and CB), and exposed from a distance of 70 cm using a 30 ampere carbon arc lamp. went.
本発明の優れた感光性を示す為に露光された感光性平版
印刷版(A)−1〜(A)−4、及び(B)をDP−4
(商品名:富士写真フィルム■製)の8倍希釈水溶液で
25℃において60秒間浸漬現像し、濃度差0.15の
グレースケールで5段目が完全にクリアーとなる露光時
間を求めたところ第1表に示すとおりとなった。The photosensitive lithographic printing plates (A)-1 to (A)-4 and (B) which were exposed to show the excellent photosensitivity of the present invention were DP-4.
(Product name: manufactured by Fuji Photo Film ■) was immersed and developed for 60 seconds at 25°C with an 8-fold diluted aqueous solution, and the exposure time was determined to make the 5th stage completely clear on a gray scale with a density difference of 0.15. The results are as shown in Table 1.
第1表かられかるように本発明の化合物(C)を用いた
感光性平版印刷版(A)−1〜(A)−4は、いずれも
(B)より露光時間が少なく感度が高い。As can be seen from Table 1, all of the photosensitive planographic printing plates (A)-1 to (A)-4 using the compound (C) of the present invention have a shorter exposure time and higher sensitivity than (B).
なお、第1表における本発明の化合物(C)の分子量は
ゲルパーミェーションクロマトグラフィー(ポリスチレ
ン標準)測定により、いずれも重量平均で20,000
〜50.000であった。The molecular weight of the compound (C) of the present invention in Table 1 was determined by gel permeation chromatography (polystyrene standard), and the weight average molecular weight was 20,000 in all cases.
~50,000.
更に本発明の優れた現像許容性を示す為、感光性平版印
刷版(A)−1〜(A)−4及びCB)の感光層上に濃
度差0.15のグレースケールを密着させ、30アンペ
アのカーボンアーク灯で70cmの距離から30秒間露
光を行った。Furthermore, in order to demonstrate the excellent development tolerance of the present invention, a gray scale with a density difference of 0.15 was closely adhered to the photosensitive layer of the photosensitive lithographic printing plates (A)-1 to (A)-4 and CB). Exposure was performed for 30 seconds from a distance of 70 cm using an ampere carbon arc lamp.
露光された感光性平版印刷版(A)−1〜(A)−4及
び(B)を実施例1と同じ現像液にて、25℃で60秒
間及び3分間浸漬現像した。濃度差0.15のグレース
ケールで60秒間及び3分間現像における完全にクリア
ーとなる段数の差を求めたところ第2表に示すとおりと
なった。The exposed photosensitive lithographic printing plates (A)-1 to (A)-4 and (B) were immersed and developed in the same developer as in Example 1 at 25° C. for 60 seconds and 3 minutes. Table 2 shows the difference in the number of completely clear steps when developing for 60 seconds and 3 minutes on a gray scale with a density difference of 0.15.
第2表
第2表かられかるように本発明の化合物(C)を用い起
感光性平版印刷版(A〕−1〜(Al−4は、何れもク
リア一部のグレースケール段数変化が小さく、現像許容
性が大きい。Table 2 As can be seen from Table 2, the photosensitive lithographic printing plates (A)-1 to (Al-4) using the compound (C) of the present invention were all clear with small changes in the number of gray scale steps in some parts. , high development tolerance.
Claims (1)
ノン−2−ジアジド−4−スルホン酸エステル化合物及
び1,2−ナフトキノン−2−ジアジド−5−スルホン
酸エステル化合物からなる群より選ばれた少くとも1種
の化合物。 (b)活性光線の照射により酸を発生し得る化合物、及
び (c)下記一般式(II)で示されるモノマーから由来さ
れる構造単位を少なくとも1モル%有し、現像液中での
その溶解度が酸の作用により増大する高分子化合物、を
含有する感光性組成物。 ▲数式、化学式、表等があります▼( I ) ▲数式、化学式、表等があります▼(II) 式中Rは一価の脂肪族又は芳香族炭化水素を示す。 R_1は水素原子、ハロゲン、もしくは置換基を有して
いてもよいアルキル基を示す。R_2、R_3、R_4
は同一でも相異していてもよく、それぞれ水素原子、置
換基を有していてもよいアルキル、アリール、もしくは
アラルキル、又は−OR_5を示す。R_5は置換基を
有していてもよいアルキル、アリール、もしくはアラル
キル基を示す。Aは単結合、−O−R_6−CO−、も
しくは▲数式、化学式、表等があります▼を示す。R_
6は置換基を有していてもよい2価の脂肪族又は芳香族
炭化水素を示す。R_7は水素原子、置換基を有してい
てもよいアルキル、アリール、もしくはアラルキル、又
は−CO−R_8を示す。R_8は置換基を有していて
もよいアルキル、アリール、もしくはアラルキル基を示
す。[Claims] (a) 1,2-naphthoquinone-2-diazido-4-sulfonic acid ester compound and 1,2-naphthoquinone-2-diazido-5-sulfonic acid ester represented by the following general formula (I) At least one compound selected from the group consisting of compounds. (b) a compound capable of generating an acid upon irradiation with actinic rays, and (c) having at least 1 mol% of a structural unit derived from a monomer represented by the following general formula (II), and its solubility in a developer. 1. A photosensitive composition containing a high molecular compound whose properties are increased by the action of an acid. ▲There are mathematical formulas, chemical formulas, tables, etc.▼(I) ▲There are mathematical formulas, chemical formulas, tables, etc.▼(II) In the formula, R represents a monovalent aliphatic or aromatic hydrocarbon. R_1 represents a hydrogen atom, a halogen, or an alkyl group which may have a substituent. R_2, R_3, R_4
may be the same or different, and each represents a hydrogen atom, alkyl, aryl, or aralkyl that may have a substituent, or -OR_5. R_5 represents an alkyl, aryl, or aralkyl group that may have a substituent. A indicates a single bond, -O-R_6-CO-, or ▲There are mathematical formulas, chemical formulas, tables, etc.▼. R_
6 represents a divalent aliphatic or aromatic hydrocarbon which may have a substituent. R_7 represents a hydrogen atom, alkyl, aryl, or aralkyl which may have a substituent, or -CO-R_8. R_8 represents an alkyl, aryl, or aralkyl group that may have a substituent.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26720386A JPS63121045A (en) | 1986-11-10 | 1986-11-10 | Photosensitive composition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26720386A JPS63121045A (en) | 1986-11-10 | 1986-11-10 | Photosensitive composition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63121045A true JPS63121045A (en) | 1988-05-25 |
Family
ID=17441559
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26720386A Pending JPS63121045A (en) | 1986-11-10 | 1986-11-10 | Photosensitive composition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63121045A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02167550A (en) * | 1988-12-21 | 1990-06-27 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH02281257A (en) * | 1989-04-21 | 1990-11-16 | Konica Corp | Colored image forming material |
-
1986
- 1986-11-10 JP JP26720386A patent/JPS63121045A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02167550A (en) * | 1988-12-21 | 1990-06-27 | Fuji Photo Film Co Ltd | Photosensitive composition |
JPH02281257A (en) * | 1989-04-21 | 1990-11-16 | Konica Corp | Colored image forming material |
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