JPS63120140U - - Google Patents
Info
- Publication number
- JPS63120140U JPS63120140U JP1172787U JP1172787U JPS63120140U JP S63120140 U JPS63120140 U JP S63120140U JP 1172787 U JP1172787 U JP 1172787U JP 1172787 U JP1172787 U JP 1172787U JP S63120140 U JPS63120140 U JP S63120140U
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- main body
- insulating film
- internal chamber
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1172787U JPS63120140U (nl) | 1987-01-29 | 1987-01-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1172787U JPS63120140U (nl) | 1987-01-29 | 1987-01-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63120140U true JPS63120140U (nl) | 1988-08-03 |
Family
ID=30799203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1172787U Pending JPS63120140U (nl) | 1987-01-29 | 1987-01-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63120140U (nl) |
-
1987
- 1987-01-29 JP JP1172787U patent/JPS63120140U/ja active Pending