JPS63120111U - - Google Patents

Info

Publication number
JPS63120111U
JPS63120111U JP1987009885U JP988587U JPS63120111U JP S63120111 U JPS63120111 U JP S63120111U JP 1987009885 U JP1987009885 U JP 1987009885U JP 988587 U JP988587 U JP 988587U JP S63120111 U JPS63120111 U JP S63120111U
Authority
JP
Japan
Prior art keywords
driving
piezo element
vertical
support frame
directions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987009885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544723Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987009885U priority Critical patent/JPH0544723Y2/ja
Publication of JPS63120111U publication Critical patent/JPS63120111U/ja
Application granted granted Critical
Publication of JPH0544723Y2 publication Critical patent/JPH0544723Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1987009885U 1987-01-28 1987-01-28 Expired - Lifetime JPH0544723Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987009885U JPH0544723Y2 (enExample) 1987-01-28 1987-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987009885U JPH0544723Y2 (enExample) 1987-01-28 1987-01-28

Publications (2)

Publication Number Publication Date
JPS63120111U true JPS63120111U (enExample) 1988-08-03
JPH0544723Y2 JPH0544723Y2 (enExample) 1993-11-15

Family

ID=30795624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987009885U Expired - Lifetime JPH0544723Y2 (enExample) 1987-01-28 1987-01-28

Country Status (1)

Country Link
JP (1) JPH0544723Y2 (enExample)

Also Published As

Publication number Publication date
JPH0544723Y2 (enExample) 1993-11-15

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