JPS63120111U - - Google Patents

Info

Publication number
JPS63120111U
JPS63120111U JP1987009885U JP988587U JPS63120111U JP S63120111 U JPS63120111 U JP S63120111U JP 1987009885 U JP1987009885 U JP 1987009885U JP 988587 U JP988587 U JP 988587U JP S63120111 U JPS63120111 U JP S63120111U
Authority
JP
Japan
Prior art keywords
driving
piezo element
vertical
support frame
directions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987009885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544723Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987009885U priority Critical patent/JPH0544723Y2/ja
Publication of JPS63120111U publication Critical patent/JPS63120111U/ja
Application granted granted Critical
Publication of JPH0544723Y2 publication Critical patent/JPH0544723Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP1987009885U 1987-01-28 1987-01-28 Expired - Lifetime JPH0544723Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987009885U JPH0544723Y2 (en:Method) 1987-01-28 1987-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987009885U JPH0544723Y2 (en:Method) 1987-01-28 1987-01-28

Publications (2)

Publication Number Publication Date
JPS63120111U true JPS63120111U (en:Method) 1988-08-03
JPH0544723Y2 JPH0544723Y2 (en:Method) 1993-11-15

Family

ID=30795624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987009885U Expired - Lifetime JPH0544723Y2 (en:Method) 1987-01-28 1987-01-28

Country Status (1)

Country Link
JP (1) JPH0544723Y2 (en:Method)

Also Published As

Publication number Publication date
JPH0544723Y2 (en:Method) 1993-11-15

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