JPS63119668U - - Google Patents

Info

Publication number
JPS63119668U
JPS63119668U JP1987008307U JP830787U JPS63119668U JP S63119668 U JPS63119668 U JP S63119668U JP 1987008307 U JP1987008307 U JP 1987008307U JP 830787 U JP830787 U JP 830787U JP S63119668 U JPS63119668 U JP S63119668U
Authority
JP
Japan
Prior art keywords
ring
quartz tube
thickness
pressing plate
sealing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987008307U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987008307U priority Critical patent/JPS63119668U/ja
Publication of JPS63119668U publication Critical patent/JPS63119668U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1987008307U 1987-01-23 1987-01-23 Pending JPS63119668U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987008307U JPS63119668U (enExample) 1987-01-23 1987-01-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987008307U JPS63119668U (enExample) 1987-01-23 1987-01-23

Publications (1)

Publication Number Publication Date
JPS63119668U true JPS63119668U (enExample) 1988-08-02

Family

ID=30792566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987008307U Pending JPS63119668U (enExample) 1987-01-23 1987-01-23

Country Status (1)

Country Link
JP (1) JPS63119668U (enExample)

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