JPS63119236U - - Google Patents

Info

Publication number
JPS63119236U
JPS63119236U JP989287U JP989287U JPS63119236U JP S63119236 U JPS63119236 U JP S63119236U JP 989287 U JP989287 U JP 989287U JP 989287 U JP989287 U JP 989287U JP S63119236 U JPS63119236 U JP S63119236U
Authority
JP
Japan
Prior art keywords
insert
cleaning hole
brush
claw
double
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP989287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP989287U priority Critical patent/JPS63119236U/ja
Publication of JPS63119236U publication Critical patent/JPS63119236U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP989287U 1987-01-28 1987-01-28 Pending JPS63119236U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP989287U JPS63119236U (US20080094685A1-20080424-C00004.png) 1987-01-28 1987-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP989287U JPS63119236U (US20080094685A1-20080424-C00004.png) 1987-01-28 1987-01-28

Publications (1)

Publication Number Publication Date
JPS63119236U true JPS63119236U (US20080094685A1-20080424-C00004.png) 1988-08-02

Family

ID=30795638

Family Applications (1)

Application Number Title Priority Date Filing Date
JP989287U Pending JPS63119236U (US20080094685A1-20080424-C00004.png) 1987-01-28 1987-01-28

Country Status (1)

Country Link
JP (1) JPS63119236U (US20080094685A1-20080424-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547724A (ja) * 1991-08-13 1993-02-26 Shin Etsu Handotai Co Ltd ウエーハのブラシ洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547724A (ja) * 1991-08-13 1993-02-26 Shin Etsu Handotai Co Ltd ウエーハのブラシ洗浄装置

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