JPS63119233U - - Google Patents
Info
- Publication number
- JPS63119233U JPS63119233U JP984687U JP984687U JPS63119233U JP S63119233 U JPS63119233 U JP S63119233U JP 984687 U JP984687 U JP 984687U JP 984687 U JP984687 U JP 984687U JP S63119233 U JPS63119233 U JP S63119233U
- Authority
- JP
- Japan
- Prior art keywords
- valve device
- thin film
- turned
- power source
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 2
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987009846U JPH0525229Y2 (en:Method) | 1987-01-28 | 1987-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987009846U JPH0525229Y2 (en:Method) | 1987-01-28 | 1987-01-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63119233U true JPS63119233U (en:Method) | 1988-08-02 |
| JPH0525229Y2 JPH0525229Y2 (en:Method) | 1993-06-25 |
Family
ID=30795546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987009846U Expired - Lifetime JPH0525229Y2 (en:Method) | 1987-01-28 | 1987-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0525229Y2 (en:Method) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4943696A (en:Method) * | 1972-08-30 | 1974-04-24 | ||
| JPS58128728A (ja) * | 1982-01-28 | 1983-08-01 | Toshiba Mach Co Ltd | 半導体気相成長装置 |
-
1987
- 1987-01-28 JP JP1987009846U patent/JPH0525229Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4943696A (en:Method) * | 1972-08-30 | 1974-04-24 | ||
| JPS58128728A (ja) * | 1982-01-28 | 1983-08-01 | Toshiba Mach Co Ltd | 半導体気相成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0525229Y2 (en:Method) | 1993-06-25 |
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