JPS6311558U - - Google Patents
Info
- Publication number
- JPS6311558U JPS6311558U JP10588086U JP10588086U JPS6311558U JP S6311558 U JPS6311558 U JP S6311558U JP 10588086 U JP10588086 U JP 10588086U JP 10588086 U JP10588086 U JP 10588086U JP S6311558 U JPS6311558 U JP S6311558U
- Authority
- JP
- Japan
- Prior art keywords
- container
- source device
- thin film
- evaporation source
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 238000007733 ion plating Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10588086U JPS6311558U ( ) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10588086U JPS6311558U ( ) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6311558U true JPS6311558U ( ) | 1988-01-26 |
Family
ID=30980726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10588086U Pending JPS6311558U ( ) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6311558U ( ) |
-
1986
- 1986-07-10 JP JP10588086U patent/JPS6311558U/ja active Pending