JPS63115215U - - Google Patents

Info

Publication number
JPS63115215U
JPS63115215U JP693787U JP693787U JPS63115215U JP S63115215 U JPS63115215 U JP S63115215U JP 693787 U JP693787 U JP 693787U JP 693787 U JP693787 U JP 693787U JP S63115215 U JPS63115215 U JP S63115215U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
wafer
cage body
conductor
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP693787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP693787U priority Critical patent/JPS63115215U/ja
Publication of JPS63115215U publication Critical patent/JPS63115215U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
JP693787U 1987-01-22 1987-01-22 Pending JPS63115215U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP693787U JPS63115215U (enrdf_load_stackoverflow) 1987-01-22 1987-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP693787U JPS63115215U (enrdf_load_stackoverflow) 1987-01-22 1987-01-22

Publications (1)

Publication Number Publication Date
JPS63115215U true JPS63115215U (enrdf_load_stackoverflow) 1988-07-25

Family

ID=30789922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP693787U Pending JPS63115215U (enrdf_load_stackoverflow) 1987-01-22 1987-01-22

Country Status (1)

Country Link
JP (1) JPS63115215U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228926A (ja) * 1988-07-19 1990-01-31 Matsushita Electron Corp 半導体装置の製造装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0228926A (ja) * 1988-07-19 1990-01-31 Matsushita Electron Corp 半導体装置の製造装置

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