JPS63115209U - - Google Patents
Info
- Publication number
- JPS63115209U JPS63115209U JP1987006807U JP680787U JPS63115209U JP S63115209 U JPS63115209 U JP S63115209U JP 1987006807 U JP1987006807 U JP 1987006807U JP 680787 U JP680787 U JP 680787U JP S63115209 U JPS63115209 U JP S63115209U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- molecular beam
- beam generator
- flange
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987006807U JPS63115209U (enExample) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987006807U JPS63115209U (enExample) | 1987-01-20 | 1987-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115209U true JPS63115209U (enExample) | 1988-07-25 |
Family
ID=30789670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987006807U Pending JPS63115209U (enExample) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115209U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5394872A (en) * | 1977-01-31 | 1978-08-19 | Mitsubishi Electric Corp | Fixing supporter for molecule beam evaporation source cell |
| JPS60200895A (ja) * | 1984-03-23 | 1985-10-11 | Agency Of Ind Science & Technol | 分子線結晶成長装置の噴出セル構造 |
-
1987
- 1987-01-20 JP JP1987006807U patent/JPS63115209U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5394872A (en) * | 1977-01-31 | 1978-08-19 | Mitsubishi Electric Corp | Fixing supporter for molecule beam evaporation source cell |
| JPS60200895A (ja) * | 1984-03-23 | 1985-10-11 | Agency Of Ind Science & Technol | 分子線結晶成長装置の噴出セル構造 |