JPS63115065U - - Google Patents
Info
- Publication number
- JPS63115065U JPS63115065U JP679587U JP679587U JPS63115065U JP S63115065 U JPS63115065 U JP S63115065U JP 679587 U JP679587 U JP 679587U JP 679587 U JP679587 U JP 679587U JP S63115065 U JPS63115065 U JP S63115065U
- Authority
- JP
- Japan
- Prior art keywords
- displacement
- voltage value
- seal
- comparator
- vacuum evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 230000002265 prevention Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP679587U JPS63115065U (enExample) | 1987-01-20 | 1987-01-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP679587U JPS63115065U (enExample) | 1987-01-20 | 1987-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63115065U true JPS63115065U (enExample) | 1988-07-25 |
Family
ID=30789648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP679587U Pending JPS63115065U (enExample) | 1987-01-20 | 1987-01-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63115065U (enExample) |
-
1987
- 1987-01-20 JP JP679587U patent/JPS63115065U/ja active Pending