JPS63115065U - - Google Patents

Info

Publication number
JPS63115065U
JPS63115065U JP679587U JP679587U JPS63115065U JP S63115065 U JPS63115065 U JP S63115065U JP 679587 U JP679587 U JP 679587U JP 679587 U JP679587 U JP 679587U JP S63115065 U JPS63115065 U JP S63115065U
Authority
JP
Japan
Prior art keywords
displacement
voltage value
seal
comparator
vacuum evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP679587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP679587U priority Critical patent/JPS63115065U/ja
Publication of JPS63115065U publication Critical patent/JPS63115065U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP679587U 1987-01-20 1987-01-20 Pending JPS63115065U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP679587U JPS63115065U (enrdf_load_stackoverflow) 1987-01-20 1987-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP679587U JPS63115065U (enrdf_load_stackoverflow) 1987-01-20 1987-01-20

Publications (1)

Publication Number Publication Date
JPS63115065U true JPS63115065U (enrdf_load_stackoverflow) 1988-07-25

Family

ID=30789648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP679587U Pending JPS63115065U (enrdf_load_stackoverflow) 1987-01-20 1987-01-20

Country Status (1)

Country Link
JP (1) JPS63115065U (enrdf_load_stackoverflow)

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