JPS63114500A - Composite piezoelectric member - Google Patents

Composite piezoelectric member

Info

Publication number
JPS63114500A
JPS63114500A JP61258254A JP25825486A JPS63114500A JP S63114500 A JPS63114500 A JP S63114500A JP 61258254 A JP61258254 A JP 61258254A JP 25825486 A JP25825486 A JP 25825486A JP S63114500 A JPS63114500 A JP S63114500A
Authority
JP
Japan
Prior art keywords
directions
columnar
composite piezoelectric
piezoelectric
composite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61258254A
Other languages
Japanese (ja)
Inventor
Chitose Nakatani
中谷 千歳
Hiroyuki Takeuchi
裕之 竹内
Kageyoshi Katakura
景義 片倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Healthcare Manufacturing Ltd
Proterial Ltd
Original Assignee
Hitachi Ltd
Hitachi Metals Ltd
Hitachi Medical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Metals Ltd, Hitachi Medical Corp filed Critical Hitachi Ltd
Priority to JP61258254A priority Critical patent/JPS63114500A/en
Publication of JPS63114500A publication Critical patent/JPS63114500A/en
Pending legal-status Critical Current

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  • Transducers For Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)

Abstract

PURPOSE:To improve a performance and to attain variety by changing at least one of the width of a columnar piezoelectric member or spaces between the columnar in two directions in which the columnar piezoelectric members are arranged. CONSTITUTION:The arrangement direction of the columnar piezoelectric members 102 is defined to be X, Y, a direction crossing X to be Y, and the width of the members 102 in the X and Y directions to be wX, wY, the spaces to be gX, gY and at least one of the width w, the space (g) of the columnar piezoelectric members 102 is made a different value in the X, Y directions. The oscillating state of the piezoelectric member 102 is changed in two directions of vertically and horizontally and undesirable oscillation is decentralized in the two directions. Thereby, a composite piezoelectric member of high performance and variety can be easily obtained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は多数の柱状圧電体が有機物中に埋め込まれた形
式の複合圧電体に関し、超音波探触子などに好適な種々
の特性を有する複合圧電体に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a composite piezoelectric material in which a large number of columnar piezoelectric materials are embedded in an organic substance, and has various characteristics suitable for ultrasonic probes and the like. Regarding composite piezoelectric materials.

〔従来の技術〕[Conventional technology]

複合圧′0体として、−様な厚さの有機物シート中にジ
ルコン酸チタン酸鉛(PZT)などの柱状圧電体がマト
リクス状に規則的に多数同一配列された構成のものが矧
られている。これは、例えばマテリアルス・リサーチ・
プルテン(Niat、ルes。
As a composite pressure body, there is a structure in which a large number of columnar piezoelectric materials such as lead zirconate titanate (PZT) are regularly and identically arranged in a matrix shape in an organic material sheet with a thickness of -. . This applies to materials research, for example.
Pulten (Niat, le es.

Bull、)第16巻、第671〜681頁(1981
年)に記載されている。しかし、縦、横の2方向で柱状
圧電体の配列を変え、特性の優れた複合圧電体を実現す
る点については配慮されていなかった。
Bull, ) Vol. 16, pp. 671-681 (1981
year). However, no consideration was given to realizing a composite piezoelectric material with excellent characteristics by changing the arrangement of the columnar piezoelectric materials in two directions, vertical and horizontal.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

超音波診断装置のセンサ(探触子)に用いられる圧電体
は厚み方向の振動を匣っているため、厚み方向のみに振
動する圧電体が望ましい。しかしながら、上記従来構成
の被合圧電体では厚み方向と直交する縦、横の2方向の
振動モードが一致しているのでそれらの振動モードが強
められるという問題があった。さらには、従来構成では
よシ多様性のある圧電体を実現することができないとい
う問題もあった。
Since the piezoelectric body used in the sensor (probe) of an ultrasonic diagnostic device contains vibrations in the thickness direction, a piezoelectric body that vibrates only in the thickness direction is desirable. However, in the piezoelectric body having the conventional structure described above, since the vibration modes in two directions, vertical and horizontal, which are perpendicular to the thickness direction, are the same, there is a problem in that these vibration modes are intensified. Furthermore, there is a problem in that the conventional configuration cannot realize a piezoelectric body with a wide variety of properties.

本発明の目的は、高性能でさらによシ多様性のある複合
圧電体の構成を提供することにある。
An object of the present invention is to provide a composite piezoelectric structure with high performance and greater versatility.

〔問題点を暦法するための手段〕[Means for calculating problems]

上記目的は、柱状圧電体の幅あるいは柱状圧電体間の間
隙のうち少なくとも1つを、柱状圧電体の配列される2
方向において変えるかあるいは柱状圧電体の形状を変え
るか、さらにはその両方の手段を用いて複合圧電体を構
成することにより達成される。
The above purpose is to reduce at least one of the width of the columnar piezoelectric bodies or the gap between the columnar piezoelectric bodies to two
This can be achieved by changing the direction or changing the shape of the columnar piezoelectric body, or by using both means to construct a composite piezoelectric body.

〔作用〕[Effect]

本発明では、柱状圧電体の憑動状態を縦、横の2方向で
変化させることで、複合圧電体としての全体的な特性を
望ましい方向に変えることができる。すなわち、本発明
では好ましくない振動を2方向に分散させ、よシ理想的
な厚み振動をする複−合圧電体を実現できる。さらKは
こうすることでより多様性のある特性の複合圧電体を実
現することも可能となる。
In the present invention, the overall characteristics of the composite piezoelectric material can be changed in a desirable direction by changing the state of attachment of the columnar piezoelectric material in two directions, vertical and horizontal. That is, according to the present invention, it is possible to disperse undesirable vibrations in two directions and realize a composite piezoelectric body that exhibits ideal thickness vibrations. Furthermore, by doing so, it is also possible to realize a composite piezoelectric material with more diverse characteristics.

〔実施例〕〔Example〕

以下、本発明の一実施例を第1図により説明する。第1
図(A)は複合圧電体101を示し、102はPZTな
どの柱状圧電体、103は有機物である。102の配列
方向をX、Xと直交する方向をY%X、 Y方向の10
2の幅をそれぞれWX。
An embodiment of the present invention will be described below with reference to FIG. 1st
Figure (A) shows a composite piezoelectric material 101, 102 is a columnar piezoelectric material such as PZT, and 103 is an organic material. 102 arrangement direction is X, the direction orthogonal to X is Y%X, 10 in the Y direction
The width of 2 is WX.

WYs間隙をgx 、g丁とする。本発明の1つの特徴
は、102の幅(W)、102間の間隙(g)のうちの
少なくとも1つをX、Y方向で異なる値にした点にある
。さらに、第1図(B)は真上より見た図で102の配
列方向X、 Yが直交しないようにした例である。また
第1図(B)の形式で%Wとgのうちの少なくとも1つ
をX、Y方向で異なる値にすることも可能である。第2
図は複合圧電体の電気インピーダンス特性の比較をした
例で、横軸は周波数f、縦軸はインピーダンスの絶対値
IZ+と位相LZである。これらでは全て、同一のPZ
T、有機物を用いて複合圧電体を形成し、さらに蒸着に
よりCr−Au電極を上下面に形成している。なお有機
物としてポリウレタンを用いた。
Let the WYs gap be gx and g. One feature of the present invention is that at least one of the width (W) of 102 and the gap (g) between 102 is set to a different value in the X and Y directions. Furthermore, FIG. 1(B) is an example in which the arrangement directions X and Y of 102 are not perpendicular to each other when viewed from directly above. It is also possible to set at least one of %W and g to different values in the X and Y directions in the format shown in FIG. 1(B). Second
The figure shows an example of comparing the electrical impedance characteristics of composite piezoelectric materials, where the horizontal axis is the frequency f, and the vertical axis is the absolute value IZ+ of impedance and the phase LZ. All of these have the same PZ
A composite piezoelectric body is formed using T and an organic substance, and Cr-Au electrodes are further formed on the upper and lower surfaces by vapor deposition. Note that polyurethane was used as the organic material.

厚さは全て0.4 ymで3.5MHz付近に厚み振動
共振点がある。第2図(A)〜(D)ではX、Y方向を
直交させ、(E)では45°(135°)に交叉させて
いる。(A)は従来構成のもので、wx=wy=0.2
aI、  g x =gr ==0.15smとした。
All have a thickness of 0.4 ym and a thickness vibration resonance point around 3.5 MHz. In FIGS. 2(A) to 2(D), the X and Y directions are orthogonal, and in FIG. 2(E), they intersect at 45° (135°). (A) is of the conventional configuration, wx=wy=0.2
aI, g x =gr ==0.15sm.

9MHz付近に見られる振動はPZT柱の形状ならびに
X。
The vibrations seen around 9MHz are due to the shape of the PZT pillar and X.

Y方向に同一な配列により生じたもので、厚み方向の振
動を使ってセンサを構成する場合、この9MH1付近の
振動は好ましくない。したがって、このQ M HZ付
近の振動を弱めるか、さらに遠ざけることが望ましい。
This vibration is caused by the same arrangement in the Y direction, and when a sensor is constructed using vibration in the thickness direction, this vibration near 9MH1 is not preferable. Therefore, it is desirable to weaken the vibration near this Q MHZ or move it further away.

第1図(A)の構成による実施例を第2図(B)〜(D
)に示す。(B)ではgのみをX、Y方向で変え、WX
 =wy =Q、2.  g x=0.15.  g 
r =0.05としている。これかられかるよう忙、9
 M Hz付近の振動が弱められていることがわかる。
The embodiment according to the configuration of FIG. 1(A) is shown in FIGS. 2(B) to (D).
). In (B), only g is changed in the X and Y directions, and WX
=wy =Q, 2. g x=0.15. g
r = 0.05. I'm busy from now on, 9
It can be seen that vibrations around MHz are weakened.

(C)はWのみをX、 Y方向で変えたもので、wx 
=0.2. W7 =Q、l、 gx =gy =0.
15とした。この場合は9 M Hz付近の振動が全く
見られない。(D)はw、gの両方をX、 Y方向で変
えた例で、Wx =0.2. Wr =0.1.  H
z =0.15゜g y = 0.25としている。こ
の例でも9MHz付近の振動は見られない。このように
本発明によれば特性の優れた複合圧電体を簡単に実現す
ることが可能である。さらに(E)ではX、Y方向を4
5゜とした例であシ、Wz =Wy = 0.2.  
g x =g r=0.15としている。これかられか
るように特性的には(A)〜(D)とはかなシ異なった
ものとなっティる。さらに、W、gt−X、Y方向で変
えることも可能である。(B)〜(E)のように、不発
明の構成によれば1%性の微妙に異なる複合圧電体をも
実現することが可能で、より多様性のある複合圧電体を
実現できる。
(C) is the one where only W is changed in the X and Y directions, wx
=0.2. W7 =Q, l, gx =gy =0.
It was set at 15. In this case, no vibrations around 9 MHz are observed. (D) is an example in which both w and g are changed in the X and Y directions, where Wx = 0.2. Wr=0.1. H
z = 0.15°g y = 0.25. In this example as well, no vibrations around 9 MHz are observed. As described above, according to the present invention, it is possible to easily realize a composite piezoelectric body with excellent characteristics. Furthermore, in (E), the X and Y directions are 4
In this example, Wz = Wy = 0.2.
It is assumed that g x =g r =0.15. As we will see, the characteristics are slightly different from (A) to (D). Furthermore, it is also possible to change in the W, gt-X, and Y directions. As shown in (B) to (E), according to the uninvented configuration, it is possible to realize a composite piezoelectric body with a slightly different 1% property, and it is possible to realize a composite piezoelectric body with more variety.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明によれば、高性能の複合圧電体な
らびにより多様性のある複合圧電体を容易に実現するこ
とが可能であり、その工学的価値は高い。
As described above, according to the present invention, it is possible to easily realize a high-performance composite piezoelectric body and a more diverse composite piezoelectric body, and its engineering value is high.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の詳細な説明図、第2図は本発明によシ
形成された複合圧電体の特性比較を示す図である。 101・・・複合圧電体、102・・・柱状圧電体、1
03・・・有機物。
FIG. 1 is a detailed explanatory diagram of the present invention, and FIG. 2 is a diagram showing a comparison of characteristics of composite piezoelectric bodies formed according to the present invention. 101... Composite piezoelectric body, 102... Column piezoelectric body, 1
03...Organic matter.

Claims (1)

【特許請求の範囲】 1、多数の柱状圧電体が有機物中に埋め込まれた構造の
複合圧電体において、該柱状圧電体の幅あるいは該柱状
圧電体間の間隙のうち少なくとも1つを、該柱状圧電体
の配列された縦、横の2方向において、変えたことを特
徴とする複合圧電体。 2、特許請求の範囲第1項記載の複合圧電体において、
該柱状圧電体の配列された2方向が互いに直交せず、そ
れに応じて柱状圧電体の形状を変えたことを特徴とする
複合圧電体。 3、特許請求の範囲第2項記載の複合圧電体において、
該柱状圧電体の幅あるいは該柱状圧電体間の間隙のうち
少なくとも1つを、該柱状圧電体の配列された2方向に
おいて、変えたことを特徴とする複合圧電体。
[Claims] 1. In a composite piezoelectric body having a structure in which a large number of columnar piezoelectric bodies are embedded in an organic substance, at least one of the width of the columnar piezoelectric bodies or the gap between the columnar piezoelectric bodies is A composite piezoelectric material characterized in that the piezoelectric materials are arranged in different directions in two directions, vertical and horizontal. 2. In the composite piezoelectric body according to claim 1,
A composite piezoelectric body characterized in that the two directions in which the columnar piezoelectric bodies are arranged are not orthogonal to each other, and the shape of the columnar piezoelectric body is changed accordingly. 3. In the composite piezoelectric body according to claim 2,
A composite piezoelectric body characterized in that at least one of the width of the columnar piezoelectric bodies or the gap between the columnar piezoelectric bodies is changed in two directions in which the columnar piezoelectric bodies are arranged.
JP61258254A 1986-10-31 1986-10-31 Composite piezoelectric member Pending JPS63114500A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61258254A JPS63114500A (en) 1986-10-31 1986-10-31 Composite piezoelectric member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61258254A JPS63114500A (en) 1986-10-31 1986-10-31 Composite piezoelectric member

Publications (1)

Publication Number Publication Date
JPS63114500A true JPS63114500A (en) 1988-05-19

Family

ID=17317671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61258254A Pending JPS63114500A (en) 1986-10-31 1986-10-31 Composite piezoelectric member

Country Status (1)

Country Link
JP (1) JPS63114500A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016507273A (en) * 2012-12-21 2016-03-10 ヴォルカノ コーポレイションVolcano Corporation Focused rotation IVUS transducer using single crystal composite material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016507273A (en) * 2012-12-21 2016-03-10 ヴォルカノ コーポレイションVolcano Corporation Focused rotation IVUS transducer using single crystal composite material
US11141134B2 (en) 2012-12-21 2021-10-12 Volcano Corporation Focused rotational IVUS transducer using single crystal composite material
US11998389B2 (en) 2012-12-21 2024-06-04 Philips Image Guided Therapy Corporation Focused rotational IVUS transducer using single crystal composite material

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