JPS63114049U - - Google Patents

Info

Publication number
JPS63114049U
JPS63114049U JP610687U JP610687U JPS63114049U JP S63114049 U JPS63114049 U JP S63114049U JP 610687 U JP610687 U JP 610687U JP 610687 U JP610687 U JP 610687U JP S63114049 U JPS63114049 U JP S63114049U
Authority
JP
Japan
Prior art keywords
resistor
electrode film
semiconductor
piezoresistors
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP610687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP610687U priority Critical patent/JPS63114049U/ja
Publication of JPS63114049U publication Critical patent/JPS63114049U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP610687U 1987-01-20 1987-01-20 Pending JPS63114049U (US06721584-20040413-M00025.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP610687U JPS63114049U (US06721584-20040413-M00025.png) 1987-01-20 1987-01-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP610687U JPS63114049U (US06721584-20040413-M00025.png) 1987-01-20 1987-01-20

Publications (1)

Publication Number Publication Date
JPS63114049U true JPS63114049U (US06721584-20040413-M00025.png) 1988-07-22

Family

ID=30788309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP610687U Pending JPS63114049U (US06721584-20040413-M00025.png) 1987-01-20 1987-01-20

Country Status (1)

Country Link
JP (1) JPS63114049U (US06721584-20040413-M00025.png)

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