JPS63114034U - - Google Patents

Info

Publication number
JPS63114034U
JPS63114034U JP563887U JP563887U JPS63114034U JP S63114034 U JPS63114034 U JP S63114034U JP 563887 U JP563887 U JP 563887U JP 563887 U JP563887 U JP 563887U JP S63114034 U JPS63114034 U JP S63114034U
Authority
JP
Japan
Prior art keywords
rails
table body
semiconductor manufacturing
manufacturing line
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP563887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP563887U priority Critical patent/JPS63114034U/ja
Publication of JPS63114034U publication Critical patent/JPS63114034U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Relays Between Conveyors (AREA)
  • Specific Conveyance Elements (AREA)
JP563887U 1987-01-19 1987-01-19 Pending JPS63114034U (forum.php)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP563887U JPS63114034U (forum.php) 1987-01-19 1987-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP563887U JPS63114034U (forum.php) 1987-01-19 1987-01-19

Publications (1)

Publication Number Publication Date
JPS63114034U true JPS63114034U (forum.php) 1988-07-22

Family

ID=30787409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP563887U Pending JPS63114034U (forum.php) 1987-01-19 1987-01-19

Country Status (1)

Country Link
JP (1) JPS63114034U (forum.php)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101172589B1 (ko) 2010-05-10 2012-08-08 주식회사 케이씨텍 이동식 화학 기계적 연마시스템 및 기판 이송 방법
KR101188579B1 (ko) 2010-05-10 2012-10-05 주식회사 케이씨텍 화학 기계식 연마시스템 및 이의 기판 이송 시스템
KR101188540B1 (ko) 2010-04-30 2012-10-05 주식회사 케이씨텍 화학 기계식 연마시스템 및 이의 기판 이송 시스템

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101188540B1 (ko) 2010-04-30 2012-10-05 주식회사 케이씨텍 화학 기계식 연마시스템 및 이의 기판 이송 시스템
KR101172589B1 (ko) 2010-05-10 2012-08-08 주식회사 케이씨텍 이동식 화학 기계적 연마시스템 및 기판 이송 방법
KR101188579B1 (ko) 2010-05-10 2012-10-05 주식회사 케이씨텍 화학 기계식 연마시스템 및 이의 기판 이송 시스템

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