JPS63114025U - - Google Patents
Info
- Publication number
- JPS63114025U JPS63114025U JP491287U JP491287U JPS63114025U JP S63114025 U JPS63114025 U JP S63114025U JP 491287 U JP491287 U JP 491287U JP 491287 U JP491287 U JP 491287U JP S63114025 U JPS63114025 U JP S63114025U
- Authority
- JP
- Japan
- Prior art keywords
- diffusion material
- liquid diffusion
- bubbling
- inert gas
- trumpet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- 230000005587 bubbling Effects 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Nozzles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP491287U JPS63114025U (OSRAM) | 1987-01-19 | 1987-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP491287U JPS63114025U (OSRAM) | 1987-01-19 | 1987-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114025U true JPS63114025U (OSRAM) | 1988-07-22 |
Family
ID=30786015
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP491287U Pending JPS63114025U (OSRAM) | 1987-01-19 | 1987-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114025U (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0878351A (ja) * | 1994-08-31 | 1996-03-22 | Nec Kyushu Ltd | ガス供給装置 |
-
1987
- 1987-01-19 JP JP491287U patent/JPS63114025U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0878351A (ja) * | 1994-08-31 | 1996-03-22 | Nec Kyushu Ltd | ガス供給装置 |