JPS63114022U - - Google Patents

Info

Publication number
JPS63114022U
JPS63114022U JP483687U JP483687U JPS63114022U JP S63114022 U JPS63114022 U JP S63114022U JP 483687 U JP483687 U JP 483687U JP 483687 U JP483687 U JP 483687U JP S63114022 U JPS63114022 U JP S63114022U
Authority
JP
Japan
Prior art keywords
wafer
gas blowing
heater
plate
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP483687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP483687U priority Critical patent/JPS63114022U/ja
Publication of JPS63114022U publication Critical patent/JPS63114022U/ja
Pending legal-status Critical Current

Links

JP483687U 1987-01-19 1987-01-19 Pending JPS63114022U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP483687U JPS63114022U (enrdf_load_stackoverflow) 1987-01-19 1987-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP483687U JPS63114022U (enrdf_load_stackoverflow) 1987-01-19 1987-01-19

Publications (1)

Publication Number Publication Date
JPS63114022U true JPS63114022U (enrdf_load_stackoverflow) 1988-07-22

Family

ID=30785869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP483687U Pending JPS63114022U (enrdf_load_stackoverflow) 1987-01-19 1987-01-19

Country Status (1)

Country Link
JP (1) JPS63114022U (enrdf_load_stackoverflow)

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